EP 2477754 B1 20180110 - METHOD AND DEVICE FOR CHEMICAL VAPOR DEPOSITION OF POLYMER FILM ONTO A SUBSTRATE
Title (en)
METHOD AND DEVICE FOR CHEMICAL VAPOR DEPOSITION OF POLYMER FILM ONTO A SUBSTRATE
Title (de)
VERFAHREN UND VORRICHTUNG ZUR CHEMISCHEN GASPHASENABSCHEIDUNG VON POLYMERFILMEN AUF EIN SUBSTRAT
Title (fr)
PROCÉDÉ ET DISPOSITIF DE DÉPÔT CHIMIQUE EN PHASE GAZEUSE D'UN FILM POLYMÈRE SUR UN SUBSTRAT
Publication
Application
Priority
- FR 0956386 A 20090917
- FR 2010051849 W 20100906
Abstract (en)
[origin: WO2011033208A1] The invention relates to a method for chemical vapor deposition of a polymer film onto a substrate (6), said method being characterized in that it comprises the following two separate, consecutive steps: - a step for the photon activation of the gas phase wherein photon activation energy (42, 43) is provided to at least one gaseous polymer precursor that is present in a mainly gaseous composition, and - a chemical vapor deposition step wherein the activated gaseous polymer precursor, from the photon activation step, is deposited onto a substrate (6) so as to form a polymer film on the substrate, the total gas phase pressure ranging from 102 to 105 Pa. The invention also relates to a device (1) for using such a method.
IPC 8 full level
B05D 3/00 (2006.01); B05D 3/06 (2006.01); B05D 7/24 (2006.01); C23C 16/00 (2006.01); C23C 16/452 (2006.01)
CPC (source: EP US)
B05D 1/60 (2013.01 - EP US); B05D 3/002 (2013.01 - EP US); B05D 3/06 (2013.01 - EP US); B05D 3/062 (2013.01 - EP US); B05D 2203/30 (2013.01 - EP US); B05D 2203/35 (2013.01 - EP US)
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK SM TR
DOCDB simple family (publication)
FR 2950080 A1 20110318; FR 2950080 B1 20120302; CN 102630188 A 20120808; CN 102630188 B 20160113; EP 2477754 A1 20120725; EP 2477754 B1 20180110; JP 2013505354 A 20130214; JP 5805090 B2 20151104; US 2012177844 A1 20120712; WO 2011033208 A1 20110324
DOCDB simple family (application)
FR 0956386 A 20090917; CN 201080041590 A 20100906; EP 10763819 A 20100906; FR 2010051849 W 20100906; JP 2012529325 A 20100906; US 201013496304 A 20100906