EP 2479779 A1 20120725 - PHOTOCURABLE TRANSFER SHEET, AND METHOD FOR FORMING RECESSED AND PROJECTED PATTERN USING SAME
Title (en)
PHOTOCURABLE TRANSFER SHEET, AND METHOD FOR FORMING RECESSED AND PROJECTED PATTERN USING SAME
Title (de)
LICHTHÄRTBARE ÜBERTRAGUNGSPLATTE UND VERFAHREN ZUM BILDEN EINGELASSENER UND PROJIZIERTER STRUKTUREN DAMIT
Title (fr)
FEUILLE DE TRANSFERT PHOTODURCISSABLE ET PROCÉDÉ DE FORMATION DE MOTIF EN CREUX ET EN BOSSES L'UTILISANT
Publication
Application
Priority
- JP 2009213968 A 20090916
- JP 2010066020 W 20100916
Abstract (en)
The present invention is to provide a photo-curable transfer sheet suitable for the preparation of an intermediate stamper in a nanoimprint method, in which the mold release properties from a mold having a fine concave-convex pattern used in the preparation of the intermediate stamper and the mold release properties of a cured photo-curable resin that is a product having a fine concave-convex pattern transferred from the intermediate stamper are excellent, and the transfer property of the fine concave-convex pattern is good; and a method for forming a concave-convex pattern by using the above-mentioned photo-curable transfer sheet. The photo-curable transfer sheet 10 having a photo-curable transfer layer 11 comprising a photo-curable composition deformable by application of pressure which comprises a polymer and a reactive diluent having a photopolymerizable functional group, wherein the polymer is an acrylic resin comprising a recurring unit derived from (meth)acrylate having an alicyclic group.
IPC 8 full level
H01L 21/027 (2006.01); B29C 33/38 (2006.01); B29C 59/02 (2006.01); B32B 3/26 (2006.01); B32B 3/30 (2006.01); B32B 27/30 (2006.01); B29K 33/04 (2006.01)
CPC (source: EP KR US)
B29C 59/022 (2013.01 - EP KR US); H01L 21/0271 (2013.01 - KR); B29C 2059/023 (2013.01 - EP KR US); B29K 2033/08 (2013.01 - EP KR US); B29K 2033/12 (2013.01 - EP KR US); B29K 2105/246 (2013.01 - EP KR US)
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK SM TR
DOCDB simple family (publication)
EP 2479779 A1 20120725; EP 2479779 A4 20151007; CN 102498544 A 20120613; CN 102498544 B 20150624; JP 2011066100 A 20110331; KR 20120052416 A 20120523; US 2012175822 A1 20120712; WO 2011034123 A1 20110324
DOCDB simple family (application)
EP 10817236 A 20100916; CN 201080041486 A 20100916; JP 2009213968 A 20090916; JP 2010066020 W 20100916; KR 20127009443 A 20100916; US 201013496329 A 20100916