EP 2486391 A1 20120815 - METHOD AND SYSTEM FOR STRUCTURAL ANALYSIS OF AN OBJECT BY MEASURING THE WAVE FRONT THEREOF
Title (en)
METHOD AND SYSTEM FOR STRUCTURAL ANALYSIS OF AN OBJECT BY MEASURING THE WAVE FRONT THEREOF
Title (de)
VERFAHREN UND SYSTEM ZUR STRUKTURANALYSE EINES OBJEKTS DURCH MESSUNG DESSEN WELLENFRONT
Title (fr)
PROCEDE ET SYSTEME D'ANALYSE STRUCTURELLE D'UN OBJET PAR MESURE DE FRONT D'ONDE
Publication
Application
Priority
- FR 0904806 A 20091008
- FR 2010052128 W 20101008
Abstract (en)
[origin: WO2011042674A1] The present invention relates to a system for structural analysis of an object (1), including a means (2) for generating an input light beam (3) arranged such as to make the generated input beam (3) interact with at least one portion of the object (1), and a means (4) for receiving the output light beam (5) resulting from the interaction between the input beam (3) and the object (1). In said system, the reception means (4) includes a wave-front analyser (4) arranged such as to measure the electromagnetic field of the wave of the received output beam (5), and the generation means (2) has spatial coherence adapted to that of the reception means (4). The invention also relates to a structural analysis method implementing such a system.
IPC 8 full level
G01N 21/47 (2006.01); G01J 9/00 (2006.01)
CPC (source: EP US)
G01N 21/4795 (2013.01 - EP US)
Citation (search report)
See references of WO 2011042674A1
Citation (examination)
NEAL D R ET AL: "Amplitude and phase beam characterization using a two-dimensional wavefront sensor", PROCEEDINGS OF SPIE, vol. 2870, 20 November 1996 (1996-11-20), pages 72 - 82, XP055172169, ISSN: 0277-786X, DOI: 10.1117/12.259947
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
DOCDB simple family (publication)
FR 2951269 A1 20110415; EP 2486391 A1 20120815; US 2012274945 A1 20121101; WO 2011042674 A1 20110414
DOCDB simple family (application)
FR 0904806 A 20091008; EP 10781961 A 20101008; FR 2010052128 W 20101008; US 201013500385 A 20101008