EP 2487485 A4 20170104 - GAS SENSOR ELEMENT AND PRODUCTION METHOD THEREFOR
Title (en)
GAS SENSOR ELEMENT AND PRODUCTION METHOD THEREFOR
Title (de)
GASSENSORELEMENT UND HERSTELLUNGSVERFAHREN DAFÜR
Title (fr)
ÉLÉMENT DE DÉTECTEUR DE GAZ ET SON PROCÉDÉ DE PRODUCTION
Publication
Application
Priority
- JP 2009232006 A 20091005
- JP 2010067232 W 20101001
Abstract (en)
[origin: EP2487485A1] Provided herein are a gas sensor element in which deformation of a sensitive portion due to stress may be reduced and a method of manufacturing the gas sensor element. A base insulating layer 9 including a heater wiring pattern 19 is formed on a front surface 3A of a support 3. The base insulating layer 9 includes a fixed portion 15 fixed to the front surface 3A of the support 3, and a nonfixed portion 17 located over an opening portion 5. A cavity portion 7 having the opening portion 5 is formed in the support 3. An electrode wiring pattern 27 and a sensitive film 31 are formed over a central portion 21 of the nonfixed portion 17 of the base insulating layer 9. The nonfixed portion 17 includes the central portion 21 and a plurality of connecting portions 23 connecting the central portion 21 and the fixed portion 15. Four connecting portions 23 each include a base portion 33 and an extended portion 35. The base portion 33 of each connecting portion 23 is formed to extend along an edge portion 5A of the opening portion 5. Each extended portion 35 is formed to extend from the base portion 33 to the central portion 21 to be connected to the central portion 21. The connecting portions 23 are formed such that the maximum width W1 of each base portion 33 is larger than the maximum width W2 of each extended portions 35.
IPC 8 full level
G01N 27/12 (2006.01)
CPC (source: EP US)
G01N 27/12 (2013.01 - EP US)
Citation (search report)
- [XY] JP 2007132762 A 20070531 - NIPPON CERAMIC KK
- [Y] KR 20040046545 A 20040605 - KOREA ELECTRONICS TECHNOLOGY
- See references of WO 2011043258A1
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
DOCDB simple family (publication)
EP 2487485 A1 20120815; EP 2487485 A4 20170104; CN 102575999 A 20120711; CN 102575999 B 20131106; JP 2011080809 A 20110421; JP 5100733 B2 20121219; US 2012193730 A1 20120802; US 9176084 B2 20151103; WO 2011043258 A1 20110414
DOCDB simple family (application)
EP 10821929 A 20101001; CN 201080044605 A 20101001; JP 2009232006 A 20091005; JP 2010067232 W 20101001; US 201013500236 A 20101001