EP 2490896 B1 20160525 - CRACK-RESISTANT THERMAL BEND ACTUATOR
Title (en)
CRACK-RESISTANT THERMAL BEND ACTUATOR
Title (de)
RISSBESTÄNDIGER THERMISCHER BIEGEAKTUATOR
Title (fr)
ACTIONNEUR À FLEXION THERMIQUE RÉSISTANT À LA FISSURATION
Publication
Application
Priority
AU 2009001089 W 20090825
Abstract (en)
[origin: WO2011022750A1] A thermal bend actuator comprises an active beam for connection to drive circuitry and a passive beam mechanically cooperating with the active beam. When a current is passed through the active beam, the active beam expands relative to the passive beam resulting in bending of the actuator. The passive beam comprises a first layer comprised of silicon nitride and a second layer comprised of silicon dioxide. The second layer is sandwiched between the first layer and the active beam to provide thermal insulation for the first layer.
IPC 8 full level
B41J 2/14 (2006.01)
CPC (source: EP)
B41J 2/14427 (2013.01)
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK SM TR
DOCDB simple family (publication)
WO 2011022750 A1 20110303; AU 2009351617 A1 20130207; AU 2009351617 B2 20130627; EP 2490896 A1 20120829; EP 2490896 A4 20140723; EP 2490896 B1 20160525; JP 2012530624 A 20121206; JP 5561747 B2 20140730; KR 20120057608 A 20120605; SG 178479 A1 20120427
DOCDB simple family (application)
AU 2009001089 W 20090825; AU 2009351617 A 20090825; EP 09848585 A 20090825; JP 2012516434 A 20090825; KR 20127001728 A 20090825; SG 2012011185 A 20090825