EP 2491407 A4 20140326 - ALIGNMENT AND ANTI-DRIFT MECHANISM
Title (en)
ALIGNMENT AND ANTI-DRIFT MECHANISM
Title (de)
AUSRICHTUNGS- UND ABTRIEBSVERHINDERUNGSMECHANISMUS
Title (fr)
MÉCANISME D'ALIGNEMENT ET D'ANTIDÉRIVE
Publication
Application
Priority
US 2009061822 W 20091023
Abstract (en)
[origin: WO2011049577A1] A system includes a displacement sensor, an actuator connected to the displacement sensor, and a feedback unit. The displacement sensor is configured to measure at least one of a relative position and a relative orientation between the displacement sensor and the target object. The feedback unit receives a signal from the displacement sensor related to the measured relative position or relative orientation and controls the actuator to move the displacement sensor on the basis of variations in the received signal arising due to a change in environmental conditions.
IPC 8 full level
G01Q 10/06 (2010.01)
CPC (source: EP)
G01Q 10/065 (2013.01)
Citation (search report)
- [XY] US 2008277582 A1 20081113 - SHI JIAN [US], et al
- [YD] US 7247827 B1 20070724 - HWANG ING-SHOUH [TW], et al
- [Y] WO 0122468 A1 20010329 - VEECO INSTR INC [US]
- [A] EP 0807799 A1 19971119 - SEIKO INSTR INC [JP]
- See references of WO 2011049577A1
Citation (examination)
US 5661548 A 19970826 - IMAI YUJI [JP]
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK SM TR
DOCDB simple family (publication)
WO 2011049577 A1 20110428; CN 102844665 A 20121226; CN 102844665 B 20150429; EP 2491407 A1 20120829; EP 2491407 A4 20140326
DOCDB simple family (application)
US 2009061822 W 20091023; CN 200980162097 A 20091023; EP 09850676 A 20091023