EP 2501840 A2 20120926 - SILICON LAYERS MADE OF POLYMER-MODIFIED LIQUID SILANE FORMULATIONS
Title (en)
SILICON LAYERS MADE OF POLYMER-MODIFIED LIQUID SILANE FORMULATIONS
Title (de)
SILIZIUMSCHICHTEN AUS POLYMERMODIFIZIERTEN FLÜSSIGSILAN-FORMULIERUNGEN
Title (fr)
COUCHES DE SILICIUM CONSTITUÉES DE FORMULATIONS DE SILANE LIQUIDE MODIFIÉES PAR DES POLYMÈRES
Publication
Application
Priority
- DE 102009053805 A 20091118
- EP 2010065598 W 20101018
Abstract (en)
[origin: WO2011061029A2] The invention relates to a formulation containing at least one silane and at least one carbon polymer in a solvent, and to the production of a silicon layer on a substrate coated with such a formulation.
IPC 8 full level
C23C 18/14 (2006.01); C07F 7/08 (2006.01); C23C 18/12 (2006.01); H01L 21/02 (2006.01)
CPC (source: EP KR US)
C09D 183/16 (2013.01 - EP KR US); C23C 18/1204 (2013.01 - EP KR US); C23C 18/122 (2013.01 - EP KR US); C23C 18/143 (2019.04 - EP KR US); H01L 21/0242 (2013.01 - EP KR US); H01L 21/02532 (2013.01 - EP KR US); H01L 21/02576 (2013.01 - EP KR US); H01L 21/02579 (2013.01 - EP KR US); H01L 21/02628 (2013.01 - EP KR US)
Citation (search report)
See references of WO 2011061029A2
Citation (examination)
- JP 2003160731 A 20030606 - NITTO DENKO CORP
- US 6514801 B1 20030204 - YUDASAKA ICHIO [JP], et al
- JP 2000265116 A 20000926 - OSAKA GAS CO LTD
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
DOCDB simple family (publication)
DE 102009053805 A1 20110526; CN 102597317 A 20120718; EP 2501840 A2 20120926; JP 2013511579 A 20130404; KR 20120091223 A 20120817; TW 201129636 A 20110901; US 2012205654 A1 20120816; US 9096922 B2 20150804; WO 2011061029 A2 20110526; WO 2011061029 A3 20111020
DOCDB simple family (application)
DE 102009053805 A 20091118; CN 201080052061 A 20101018; EP 10768480 A 20101018; EP 2010065598 W 20101018; JP 2012539251 A 20101018; KR 20127012724 A 20101018; TW 99133334 A 20100930; US 201013503668 A 20101018