EP 2507402 A4 20131023 - LINEAR DEPOSITION SOURCE
Title (en)
LINEAR DEPOSITION SOURCE
Title (de)
LINEARABLAGERUNGSQUELLE
Title (fr)
SOURCE DE DÉPOSITION LINÉAIRE
Publication
Application
Priority
- US 62818909 A 20091130
- US 2010039085 W 20100617
Abstract (en)
[origin: TW201118961A] A deposition source includes a crucible for containing deposition material and a body comprising a conductance channel. An input of the conductance channel is coupled to an output of the crucible. A heater heats the crucible so that the crucible evaporates the deposition material into the conductance channel. A heat shield comprising a plurality of heat resistant material layers is positioned around at least one of the heater and the body. A plurality of nozzles is coupled to an output of the conductance channel so that evaporated deposition material is transported from the crucible through the conductance channel to the plurality of nozzles where the evaporated deposition material is ejected from the plurality of nozzles to form a deposition flux.
IPC 8 full level
C23C 14/24 (2006.01); C23C 14/26 (2006.01); F16L 59/02 (2006.01)
CPC (source: EP KR)
C23C 14/24 (2013.01 - KR); C23C 14/243 (2013.01 - EP); C23C 14/26 (2013.01 - EP KR); C23C 14/562 (2013.01 - EP); F16L 59/029 (2013.01 - EP)
Citation (search report)
- [XY] US 4401052 A 19830830 - BARON BILL N [US], et al
- [Y] US 7194197 B1 20070320 - WENDT ROBERT G [US], et al
- [Y] US 2004076810 A1 20040422 - BLAIN DAVID P [US], et al
- See references of WO 2011065998A1
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK SM TR
DOCDB simple family (publication)
CN 102686765 A 20120919; CN 102712993 A 20121003; EP 2507402 A1 20121010; EP 2507402 A4 20131023; EP 2507403 A1 20121010; EP 2507403 A4 20131023; KR 20120101425 A 20120913; KR 20120104559 A 20120921; TW 201118961 A 20110601; TW 201142055 A 20111201
DOCDB simple family (application)
CN 201080059907 A 20100617; CN 201080059918 A 20100617; EP 10833707 A 20100617; EP 10833708 A 20100617; KR 20127014037 A 20100617; KR 20127014038 A 20100617; TW 99119640 A 20100617; TW 99119643 A 20100617