EP 2507403 A4 20131023 - LINEAR DEPOSITION SOURCE
Title (en)
LINEAR DEPOSITION SOURCE
Title (de)
LINEARABLAGERUNGSQUELLE
Title (fr)
SOURCE DE DÉPOSITION LINÉAIRE
Publication
Application
Priority
- US 62818909 A 20091130
- US 2010039093 W 20100617
Abstract (en)
[origin: TW201118961A] A deposition source includes a crucible for containing deposition material and a body comprising a conductance channel. An input of the conductance channel is coupled to an output of the crucible. A heater heats the crucible so that the crucible evaporates the deposition material into the conductance channel. A heat shield comprising a plurality of heat resistant material layers is positioned around at least one of the heater and the body. A plurality of nozzles is coupled to an output of the conductance channel so that evaporated deposition material is transported from the crucible through the conductance channel to the plurality of nozzles where the evaporated deposition material is ejected from the plurality of nozzles to form a deposition flux.
IPC 8 full level
C23C 14/24 (2006.01); C23C 14/26 (2006.01); F16L 59/02 (2006.01)
CPC (source: EP KR)
C23C 14/24 (2013.01 - KR); C23C 14/243 (2013.01 - EP); C23C 14/26 (2013.01 - EP KR); C23C 14/562 (2013.01 - EP); F16L 59/029 (2013.01 - EP)
Citation (search report)
- [XY] EP 1632586 A2 20060308 - PIONEER TOHOKU CORP [JP]
- [X] JP 2007146219 A 20070614 - HITACHI SHIPBUILDING ENG CO
- [Y] US 2004255857 A1 20041223 - CHOW PETER P [US], et al
- [Y] EP 1342808 A1 20030910 - EASTMAN KODAK CO [US]
- [A] WO 2009134041 A2 20091105 - SUNIC SYSTEM LTD [KR], et al
- [A] US 2003054100 A1 20030320 - ESER ERTEN [US], et al
- [Y] US 2009229524 A1 20090917 - KIM SEONG-MOON [KR], et al
- See references of WO 2011065999A1
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK SM TR
DOCDB simple family (publication)
CN 102686765 A 20120919; CN 102712993 A 20121003; EP 2507402 A1 20121010; EP 2507402 A4 20131023; EP 2507403 A1 20121010; EP 2507403 A4 20131023; KR 20120101425 A 20120913; KR 20120104559 A 20120921; TW 201118961 A 20110601; TW 201142055 A 20111201
DOCDB simple family (application)
CN 201080059907 A 20100617; CN 201080059918 A 20100617; EP 10833707 A 20100617; EP 10833708 A 20100617; KR 20127014037 A 20100617; KR 20127014038 A 20100617; TW 99119640 A 20100617; TW 99119643 A 20100617