EP 2510535 B1 20140226 - MAGNETIC DEFLECTION SYSTEM FOR ELECTRON BEAMS
Title (en)
MAGNETIC DEFLECTION SYSTEM FOR ELECTRON BEAMS
Title (de)
ABLENKVORRICHTUNG FÜR ELEKTRONENSTRAHLEN
Title (fr)
SYSTÈME DE DÉVIATION DES FAISCEAUX ÉLECTRONIQUES
Publication
Application
Priority
- DE 102009057486 A 20091210
- DE 2010001437 W 20101210
Abstract (en)
[origin: WO2011069493A1] The invention relates to a vaporizing device, wherein an elongated pot (5) having material to be vaporized is hit by an electron beam (8), preferably by means of several electron guns (7). Each electron gun (7) is responsible for a certain section of the pot (5). In said section, the electron beam (8) is guided over the melt (6) in a pendular manner. For this purpose, a first magnetic deflecting unit (12) is provided, which produces a parallel displacement of the electron beam (8) that changes. In order to achieve this, two magnetic fields (13, 14) are provided, the magnetic field boundaries (20, 21) of which form a type of lens system, wherein the outlet side of the first magnetic field (13) is convex and the inlet side of the second magnetic field (14) is concave. In order to deflect the electron beam (8) into the pot (5), a second magnetic deflecting unit (15) is provided, the magnetic field of which can be moved synchronously with the beam displacement parallel to the pot (5).
IPC 8 full level
C23C 14/30 (2006.01); C23C 14/54 (2006.01); H01J 37/147 (2006.01); H01J 37/305 (2006.01)
CPC (source: EP US)
C23C 14/30 (2013.01 - EP US); C23C 14/542 (2013.01 - EP US); H01J 37/1472 (2013.01 - EP US); H01J 37/1475 (2013.01 - EP US); H01J 37/3053 (2013.01 - EP US); H01J 2237/1523 (2013.01 - EP US); H01J 2237/3132 (2013.01 - EP US)
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
DOCDB simple family (publication)
DE 102009057486 A1 20110616; DE 112010004724 A5 20120927; EP 2510535 A1 20121017; EP 2510535 B1 20140226; US 2012298041 A1 20121129; US 9218936 B2 20151222; WO 2011069493 A1 20110616
DOCDB simple family (application)
DE 102009057486 A 20091210; DE 112010004724 T 20101210; DE 2010001437 W 20101210; EP 10814760 A 20101210; US 201013514230 A 20101210