EP 2511911 A2 20121017 - Diffraction grating for x-ray talbot interferometer, method of manufacturing the same, and x-ray talbot interferometer
Title (en)
Diffraction grating for x-ray talbot interferometer, method of manufacturing the same, and x-ray talbot interferometer
Title (de)
Diffraktionsgitter für Röntgen-Talbot-Interferometer, Verfahren zu seiner Herstellung und Röntgen-Talbot-Interferometer
Title (fr)
Réseau de diffraction d'interféromètre Talbot à rayons x, son procédé de fabrication et interféromètre Talbot à rayons x
Publication
Application
Priority
JP 2011090607 A 20110415
Abstract (en)
A diffraction grating (20) for an X-ray Talbot interferometer includes: a plurality of ridge-like X-ray absorbing portions (20b) made of a metal and formed on a substrate (22) along one direction at predetermined intervals; and a resin (26) interposed in a groove portion (20a) between neighboring X-ray absorbing portions of the plurality of ridge-like X-ray absorbing portions. The plurality of ridge-like X-ray absorbing portions are each formed of at least two unit metal layers (2b, 4b, and 6b) laminated perpendicularly to a surface of the substrate. The at least two unit metal layers are formed through cutting of a metal film.
IPC 8 full level
G21K 1/06 (2006.01)
CPC (source: EP)
G21K 1/06 (2013.01); G21K 1/062 (2013.01); G21K 2207/005 (2013.01)
Citation (applicant)
- WO 2004058070 A1 20040715 - MOMOSE ATSUSHI [JP]
- JP 2006259264 A 20060928 - NEW IND RES ORGANIZATION
- JP 2009042528 A 20090226 - HYOGO PREFECTURE
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
DOCDB simple family (publication)
EP 2511911 A2 20121017; EP 2511911 A3 20131113; JP 2012225966 A 20121115
DOCDB simple family (application)
EP 12164090 A 20120413; JP 2011090607 A 20110415