EP 2513949 A1 20121024 - METHOD AND DEVICE FOR CONTROLLING THE MANUFACTURE OF SEMICONDUCTOR BY MEASURING CONTAMINATION
Title (en)
METHOD AND DEVICE FOR CONTROLLING THE MANUFACTURE OF SEMICONDUCTOR BY MEASURING CONTAMINATION
Title (de)
VERFAHREN UND VORRICHTUNG ZUR KONTROLLE DER HERSTELLUNG VON HALBLEITLEITERN MITTELS KONTAMINATIONSMESSUNG
Title (fr)
PROCEDE ET DISPOSITIF DE PILOTAGE DE FABRICATION DE SEMI-CONDUCTEURS PAR MESURE DE CONTAMINATION
Publication
Application
Priority
- FR 0959235 A 20091218
- EP 2010069973 W 20101216
Abstract (en)
[origin: WO2011073348A1] The present invention relates to a device for handling substrates in a semiconductor manufacturing plant that has substrate processing facilities, a substrate storage means, a substrate transport means, and a system for controlling manufacturing execution systems (MES) in functional relationship to the substrate processing facilities, the substrate storage means, and the substrate transport means. Said device includes: at least one substrate storage and transport box that is transported by the transport means and stored in the storage means; at least one device for analyzing the gases forming the inner atmosphere of a substrate storage and transport box, said analyzing device producing analysis signals that represent the critical gas amount that is capable of generating molecular contamination and is present in the storage and transport box; and a control device that controls the transport means and storage means, the control device including instructions for detecting a need for molecular decontamination on the basis of analysis signals emitted by the gas-analyzing device.
IPC 8 full level
H01L 21/00 (2006.01); H01L 21/673 (2006.01)
CPC (source: EP KR US)
H01L 21/67253 (2013.01 - EP KR US); H01L 21/67389 (2013.01 - EP KR US); Y02P 90/02 (2015.11 - EP KR US)
Citation (search report)
See references of WO 2011073348A1
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
DOCDB simple family (publication)
WO 2011073348 A1 20110623; CN 102714135 A 20121003; EP 2513949 A1 20121024; FR 2954583 A1 20110624; FR 2954583 B1 20171124; JP 2013514646 A 20130425; JP 5902626 B2 20160413; KR 101761956 B1 20170726; KR 20120099726 A 20120911; SG 181608 A1 20120730; TW 201138005 A 20111101; TW I493645 B 20150721; US 2012259449 A1 20121011; US 9779972 B2 20171003
DOCDB simple family (application)
EP 2010069973 W 20101216; CN 201080057455 A 20101216; EP 10798766 A 20101216; FR 0959235 A 20091218; JP 2012543768 A 20101216; KR 20127015654 A 20101216; SG 2012042545 A 20101216; TW 99143728 A 20101214; US 201013516376 A 20101216