EP 2516692 A1 20121031 - METHOD FOR COATING A SUBSTRATE WITH ALUMINUM-DOPED ZINC OXIDE
Title (en)
METHOD FOR COATING A SUBSTRATE WITH ALUMINUM-DOPED ZINC OXIDE
Title (de)
VERFAHREN ZUM BESCHICHTEN EINES SUBSTRATS MIT ALUMINIUMDOTIERTEM ZINKOXID
Title (fr)
PROCÉDÉ D'APPLICATION D'UN REVÊTEMENT D'OXYDE DE ZINC DOPÉ À L'ALUMINIUM SUR UN SUBSTRAT
Publication
Application
Priority
- DE 102009060547 A 20091223
- EP 2010070655 W 20101223
Abstract (en)
[origin: WO2011076921A1] The invention relates to a method for coating a substrate with aluminum-doped zinc oxide, comprising the steps of generating a nucleation coating between 5 nm and 400 nm thick, comprising zinc oxide or doped, in particular aluminum-doped zinc oxide, on the surface of the substrate by atomizing a solid target; generating a quasi-epitaxially propagating top coating comprising aluminum-doped zinc oxide on the nucleation coating; and wet chemically etching the top coating.
IPC 8 full level
C23C 14/02 (2006.01); C23C 14/08 (2006.01); C23C 14/58 (2006.01); C30B 23/02 (2006.01); C30B 25/06 (2006.01); C30B 29/16 (2006.01); C30B 33/10 (2006.01); H01L 31/0216 (2006.01); H01L 31/18 (2006.01)
CPC (source: EP KR US)
C23C 14/02 (2013.01 - KR); C23C 14/024 (2013.01 - EP US); C23C 14/08 (2013.01 - KR); C23C 14/086 (2013.01 - EP US); C23C 14/35 (2013.01 - KR); C23C 14/58 (2013.01 - KR); C23C 14/5873 (2013.01 - EP US); H01L 21/768 (2013.01 - US); H01L 31/02016 (2013.01 - US); H01L 31/022483 (2013.01 - EP US); H01L 31/1884 (2013.01 - EP US); Y02E 10/50 (2013.01 - US)
Citation (search report)
See references of WO 2011076921A1
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
DOCDB simple family (publication)
WO 2011076921 A1 20110630; CN 102741446 A 20121017; DE 102009060547 A1 20110630; EP 2516692 A1 20121031; JP 2013515851 A 20130509; KR 20120096074 A 20120829; US 2013203211 A1 20130808
DOCDB simple family (application)
EP 2010070655 W 20101223; CN 201080062855 A 20101223; DE 102009060547 A 20091223; EP 10798099 A 20101223; JP 2012545346 A 20101223; KR 20127018077 A 20101223; US 201013519030 A 20101223