EP 2519082 A1 20121031 - Method and system for generating electromagnetic radiation
Title (en)
Method and system for generating electromagnetic radiation
Title (de)
Verfahren und Vorrichtung zur Erzeugung elektromagnetischer Strahlung
Title (fr)
Procédé et dispositif pour générer un rayonnement électromagnétique
Publication
Application
Priority
EP 11164167 A 20110428
Abstract (en)
Method of generating electromagnetic radiation having a wavelength in the ultraviolet range, comprising: generating at least one liquid and/or solid particle that comprises an excitable material; moving the at least one particle in an irradiation region of a first radiation beam; and irradiating the at least one particle by means of the first radiation beam, for exciting the excitable material comprised by the at least one particle and thereby generating the electromagnetic radiation. Generating the at least one particle comprises: providing a donor structure comprising at least a substrate and a donor layer, which donor layer comprises the excitable material; and irradiating the donor structure by means of a pulse of a second radiation beam causing release of a portion of the donor layer, said released portion forming the at least one particle.
IPC 8 full level
H05G 2/00 (2006.01)
CPC (source: EP)
H05G 2/001 (2013.01)
Citation (applicant)
- US 6862339 B2 20050301 - RICHARDSON MARTIN [US]
- US 2005199829 A1 20050915 - PARTLO WILLIAM N [US], et al
- DAVID P. BANKS, CHRISTOS GRIVAS, JOHN D. MILLS, ROBERT W. EASON, IOANNA ZERGIOTI: "Nanodroplets deposited in microarrays by femtosecond Ti-sapphire laser-induced forward transfer", APPLIED PHYSICS LETTERS, vol. 89, 2006, pages 193107
- AIKO NARAZAKI, TADATAKE SATO, RYOZO KUROSAKI, YSHIZO KAWAGUCHI, HIROYUKI NIINO: "Nano- and microdot array formation by laser-induced dot transfer", APPLIED SURFACE SCIENCE, vol. 225, 2009, pages 9703 - 9706
Citation (search report)
- [A] DE 19983270 B4 20090730 - AGENCY IND SCIENCE TECHN [JP]
- [XA] NAKANO H ET AL: "EFFECTS OF AN ULTRASHORT PREPULSE ON SOFT X-RAY GENERATION FROM AN ALUMINIUM PLASMA PRODUCED BY FEMTOSECOND TI:SAPPHIRE LASER PULSES", APPLIED PHYSICS B: LASERS AND OPTICS, SPRINGER INTERNATIONAL, BERLIN, DE, vol. B63, no. 2, 1 August 1996 (1996-08-01), pages 107 - 111, XP000620066, ISSN: 0946-2171, DOI: 10.1007/BF01095257
- [A] HANEY S J ET AL: "PROTOTYPE HIGH-SPEED TAPE TARGET TRANSPORT FOR A LASER PLASMA SOFT-X-RAY PROJECTION LITHOGRAPHY SOURCE", APPLIED OPTICS, OPTICAL SOCIETY OF AMERICA, WASHINGTON, DC; US, vol. 32, no. 34, 1 December 1993 (1993-12-01), pages 6934 - 6937, XP000414599, ISSN: 0003-6935, DOI: 10.1364/AO.32.006934
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
DOCDB simple family (publication)
DOCDB simple family (application)
EP 11164167 A 20110428; NL 2012050287 W 20120427