EP 2522153 A1 20121114 - COMPONENT HAVING MICROMECHANICAL MICROPHONESTRUCTURE AND METHOD FOR PRODUCING
Title (en)
COMPONENT HAVING MICROMECHANICAL MICROPHONESTRUCTURE AND METHOD FOR PRODUCING
Title (de)
BAUELEMENT MIT EINER MIKROMECHANISCHEN MIKROFONSTRUKTUR UND VERFAHREN ZU DESSEN HERSTELLUNG
Title (fr)
COMPOSANT AVEC UNE STRUCTURE DE MICROPHONE MICROMÉCANIQUE ET PROCÉDÉ DE FABRICATION D'UN TEL COMPOSANT
Publication
Application
Priority
- DE 102010000666 A 20100105
- EP 2010066854 W 20101105
Abstract (en)
[origin: WO2011082861A1] The invention relates to measures for improving the acoustic properties of a microphone component produced in sacrificial layer technology. According to the invention, the micromechanical microphone structure of such a component (10) is implemented in a layer structure and comprises at least one membrane which can be deflected by sound pressure and which is implemented in a membrane layer and a fixed, acoustically permeable counter-element (12) for the membrane which is implemented in a thick function layer over the membrane layer and has passage openings (13) for sound induction. According to the invention, the passage openings (13) are arranged over the center region of the membrane for sound induction, whereas acoustic, extensively passive perforation openings (14) are designed in the counter-element (12) over the edge region of the membrane.
IPC 8 full level
H04R 19/00 (2006.01)
CPC (source: EP US)
H04R 19/005 (2013.01 - EP US)
Citation (search report)
See references of WO 2011082861A1
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
DOCDB simple family (publication)
WO 2011082861 A1 20110714; CN 102714772 A 20121003; CN 102714772 B 20151125; DE 102010000666 A1 20110707; EP 2522153 A1 20121114; EP 2522153 B1 20140212; TW 201127089 A 20110801; TW I473506 B 20150211; US 2013010989 A1 20130110; US 9042581 B2 20150526
DOCDB simple family (application)
EP 2010066854 W 20101105; CN 201080060665 A 20101105; DE 102010000666 A 20100105; EP 10781632 A 20101105; TW 100100006 A 20110103; US 201013520444 A 20101105