EP 2525837 A1 20121128 - DEVICE FOR IRRADIATING SURFACES AND USE OF A RADIATION EMITTER
Title (en)
DEVICE FOR IRRADIATING SURFACES AND USE OF A RADIATION EMITTER
Title (de)
VORRICHTUNG ZUM BESTRAHLEN VON OBERFLÄCHEN UND VERWENDUNG EINES STRAHLERS
Title (fr)
DISPOSITIF D'IRRADIATION DES SURFACES ET UTILISATION D'UN ÉMETTEUR DE RAYONNEMENT
Publication
Application
Priority
- DE 102010043208 A 20101102
- EP 2011068770 W 20111026
Abstract (en)
[origin: WO2012059383A1] The invention relates to a device (1) for irradiating surfaces, having a radiating element, wherein the radiating element has at least one tunnel-like passage (3) and a means (8, 11) which is designed to allow a process gas to flow through the at least one tunnel-like passage (3). A separate gas supply device can thereby be omitted. The device can optionally also have a socket (8) of the radiating element having at least one gas opening (12) for supplying and/or discharging process gas.
IPC 8 full level
A61L 2/10 (2006.01); H01J 5/52 (2006.01); H01J 61/30 (2006.01); H01J 65/04 (2006.01)
CPC (source: EP US)
A61L 2/10 (2013.01 - EP US); H01J 5/52 (2013.01 - EP US); H01J 61/305 (2013.01 - EP US); H01J 65/046 (2013.01 - EP US); A61L 2202/11 (2013.01 - EP US)
Citation (search report)
See references of WO 2012059383A1
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
DOCDB simple family (publication)
DE 102010043208 A1 20120503; CN 103189075 A 20130703; CN 103189075 B 20160120; EP 2525837 A1 20121128; US 2013216431 A1 20130822; US 8940229 B2 20150127; WO 2012059383 A1 20120510
DOCDB simple family (application)
DE 102010043208 A 20101102; CN 201180052938 A 20111026; EP 11785354 A 20111026; EP 2011068770 W 20111026; US 201113812870 A 20111026