EP 2529182 A1 20121205 - SYSTEM AND METHOD FOR ASSESSING INHOMOGENEOUS DEFORMATIONS IN MULTILAYER PLATES
Title (en)
SYSTEM AND METHOD FOR ASSESSING INHOMOGENEOUS DEFORMATIONS IN MULTILAYER PLATES
Title (de)
SYSTEM UND VERFAHREN ZUR BEURTEILUNG INHOMOGENER DEFORMATIONEN IN MEHRSCHICHTIGEN PLATTEN
Title (fr)
SYSTEME ET PROCEDE D'EVALUATION DE DEFORMATIONS INHOMOGENES DANS DES PLAQUES MULTICOUCHES
Publication
Application
Priority
- FR 1050468 A 20100125
- FR 2011050127 W 20110124
Abstract (en)
[origin: WO2011089368A1] The invention relates to a method for assessing inhomogeneous deformations in a first plate (110), the first plate being adhered by molecular bonding to a second plate (120). Said method includes a step of recording a plurality of measurement points, each one of the measurement points being locally representative of the level of the surface of the first plate; a step of defining a surface profile of the first plate passing through a plurality of the measurement points; a step of processing the surface profile of the first plate in order to define a typical magnitude thereof; and a step of assessing a level of inhomogeneous deformations in the first plate according to the typical magnitude. The invention further relates to a device (147) for assessing such inhomogeneous deformations.
IPC 8 full level
G01B 17/06 (2006.01); G01B 21/32 (2006.01); G01N 29/06 (2006.01); G03F 7/20 (2006.01)
CPC (source: EP KR US)
G01B 17/06 (2013.01 - EP KR US); G01B 21/32 (2013.01 - EP KR US); G01N 29/06 (2013.01 - KR); G01N 29/0681 (2013.01 - EP US); G03F 7/20 (2013.01 - KR); G01N 2291/2697 (2013.01 - EP US); G03F 7/70616 (2013.01 - US); G03F 7/70633 (2013.01 - US); Y10S 73/01 (2013.01 - KR)
Citation (search report)
See references of WO 2011089368A1
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
DOCDB simple family (publication)
WO 2011089368 A1 20110728; CN 102741650 A 20121017; CN 102741650 B 20160316; EP 2529182 A1 20121205; FR 2955654 A1 20110729; FR 2955654 B1 20120330; JP 2013518401 A 20130520; JP 5633854 B2 20141203; KR 20120123105 A 20121107; KR 20150006901 A 20150119; SG 182423 A1 20120830; US 2013054154 A1 20130228; US 9733075 B2 20170815
DOCDB simple family (application)
FR 2011050127 W 20110124; CN 201180007676 A 20110124; EP 11705922 A 20110124; FR 1050468 A 20100125; JP 2012549406 A 20110124; KR 20127022108 A 20110124; KR 20147036799 A 20110124; SG 2012050357 A 20110124; US 201113574585 A 20110124