EP 2534676 A1 20121219 - APPARATUS AND METHOD FOR TRANSPORTING SUBSTRATES
Title (en)
APPARATUS AND METHOD FOR TRANSPORTING SUBSTRATES
Title (de)
VORRICHTUNG UND VERFAHREN ZUM TRANSPORT VON SUBSTRATEN
Title (fr)
DISPOSITIF ET PROCÉDÉ DE TRANSPORT DE SUBSTRATS
Publication
Application
Priority
- DE 102010008233 A 20100211
- EP 2010062915 W 20100902
Abstract (en)
[origin: WO2011098157A1] An apparatus for transporting silicon wafers in a horizontal transporting direction into a printing device has two transporting units, which each have a traversing device and a holding means thereon. At least two transporting units each with a holding means are provided, wherein the traversing devices of said units run next to each other along the transporting direction. The holding means are each formed and arranged in such a way that an unloaded holding means has space to pass by a holding means loaded with a silicon wafer. The traversing devices are rails and the holding means are carriages mounted thereon.
IPC 8 full level
H01L 21/677 (2006.01); H01L 21/687 (2006.01)
CPC (source: EP US)
B05C 13/02 (2013.01 - US); H01L 21/67748 (2013.01 - EP US); H01L 21/67784 (2013.01 - EP US); H01L 21/68714 (2013.01 - EP US); H01L 21/68764 (2013.01 - EP US)
Citation (search report)
See references of WO 2011098157A1
Citation (examination)
US 2008014058 A1 20080117 - HONGKHAM STEVE S [US], et al
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK SM TR
DOCDB simple family (publication)
DE 102010008233 A1 20110811; CN 102782826 A 20121114; EP 2534676 A1 20121219; JP 2013519997 A 20130530; US 2013101738 A1 20130425; WO 2011098157 A1 20110818
DOCDB simple family (application)
DE 102010008233 A 20100211; CN 201080063557 A 20100902; EP 10751653 A 20100902; EP 2010062915 W 20100902; JP 2012552273 A 20100902; US 201013578568 A 20100902