EP 2537175 A1 20121226 - DEVICE FOR THERMALLY TREATING SUBSTRATES
Title (en)
DEVICE FOR THERMALLY TREATING SUBSTRATES
Title (de)
VORRICHTUNG ZUR THERMISCHEN BEHANDLUNG VON SUBSTRATEN
Title (fr)
DISPOSITIF DE TRAITEMENT THERMIQUE DE SUBSTRATS
Publication
Application
Priority
- DE 102010008084 A 20100215
- EP 2011000680 W 20110214
Abstract (en)
[origin: WO2011098295A1] The invention relates to an inner heat treatment chamber (3) for thermally processing a substrate (20), comprising walls (10) that surround an inner space (24) of the inner heat treatment chamber (3), a storage unit (8) for storing the substrate (20) during the thermal processing and an energy source (11) for introducing energy into the inner space (24) of the inner heat treatment chamber (3), wherein at least a part of the inner sides of the walls (10) is designed to reflect power introduced by the energy source (11). The at least one part of the inner sides of the walls (10) is made of a material that reflects at least infrared radiation to a high degree. The invention further relates to an inner heat treatment chamber (3) for thermally processing a substrate (20), comprising walls (10) that surround an inner space (24) of the inner heat treatment chamber (3), a storage unit (8) for storing the substrates (20) during the thermal processing and an energy source (11) for introducing energy into the inner space (24) of the inner heat treatment chamber, wherein a cooling device (14) is provided for cooling the walls (10).
IPC 8 full level
H01L 21/00 (2006.01)
CPC (source: EP KR US)
F27D 11/12 (2013.01 - US); H01L 21/67109 (2013.01 - EP KR US); H01L 21/67115 (2013.01 - EP KR US)
Citation (examination)
EP 2144026 A1 20100113 - PROBST VOLKER [DE]
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
DOCDB simple family (publication)
WO 2011098295 A1 20110818; CN 102859646 A 20130102; DE 102010008084 A1 20110818; EP 2537175 A1 20121226; JP 2013519863 A 20130530; KR 20130020882 A 20130304; TW 201135847 A 20111016; US 2013129329 A1 20130523
DOCDB simple family (application)
EP 2011000680 W 20110214; CN 201180019194 A 20110214; DE 102010008084 A 20100215; EP 11708696 A 20110214; JP 2012553212 A 20110214; KR 20127024094 A 20110214; TW 100104858 A 20110215; US 201113579212 A 20110214