EP 2548998 B1 20150701 - Apparatus for electrochemical deposition of a metal
Title (en)
Apparatus for electrochemical deposition of a metal
Title (de)
Vorrichtung zur elektrochemischen Abscheidung eines Metalls
Title (fr)
Appareil de dépôt électro-chimique d'un métal
Publication
Application
Priority
EP 11174683 A 20110720
Abstract (en)
[origin: EP2548998A1] The invention as described in the following relates to an apparatus for the electrochemical deposition of a metal on a substrate, which apparatus is capable of refreshing an electrolyte used for the deposition in a continuous way. Furthermore, the invention as described relates to a method of refreshing an electrolyte for the electrochemical deposition of a metal on a substrate.
IPC 8 full level
C25D 21/18 (2006.01); C25D 17/12 (2006.01); C25D 21/14 (2006.01); C25D 3/54 (2006.01)
CPC (source: EP US)
C25D 17/12 (2013.01 - EP US); C25D 21/14 (2013.01 - EP US); C25D 21/18 (2013.01 - EP US); C25D 3/54 (2013.01 - EP US)
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
DOCDB simple family (publication)
EP 2548998 A1 20130123; EP 2548998 B1 20150701; ES 2546065 T3 20150918; US 2014158545 A1 20140612; WO 2013013119 A1 20130124
DOCDB simple family (application)
EP 11174683 A 20110720; ES 11174683 T 20110720; US 2012047535 W 20120720; US 201214234080 A 20120720