EP 2549115 A3 20150805 - Turbomolecular pump
Title (en)
Turbomolecular pump
Title (de)
Turbomolekularpumpe
Title (fr)
Pompe turbomoléculaire
Publication
Application
Priority
DE 102011108115 A 20110720
Abstract (en)
[origin: EP2549115A2] The pump has a rotor, a pre-vacuum side stator disk, an average stator disk and a high-vacuum side stator disk provided with dividing plates (50, 52) and blades extending between inner radius (202) and outer radius (204). Blocking units (60, 62) are partially arranged between the inner radius and the outer radius. The disks are connected by spacer rings with respect to a shaft and arranged alternately with rotor disks and axially spaced from each other. The stator disks exhibit blade and disk assemblies.
IPC 8 full level
F04D 19/04 (2006.01); F04D 29/54 (2006.01); F04D 29/64 (2006.01)
CPC (source: EP)
F04D 19/042 (2013.01); F04D 29/542 (2013.01); F04D 29/644 (2013.01)
Citation (search report)
- [XAI] DE 69928866 T2 20060706 - BOC EDWARDS JAPAN LTD [JP]
- [XI] JP 2004353652 A 20041216 - OSAKA VACUUM LTD
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
DOCDB simple family (publication)
EP 2549115 A2 20130123; EP 2549115 A3 20150805; DE 102011108115 A1 20130124
DOCDB simple family (application)
EP 12174596 A 20120702; DE 102011108115 A 20110720