EP 2558826 A1 20130220 - AIR MASS METER
Title (en)
AIR MASS METER
Title (de)
LUFTMASSENMESSER
Title (fr)
DISPOSITIF DE MESURE DU DÉBIT MASSIQUE DE L'AIR
Publication
Application
Priority
- DE 102010015522 A 20100416
- EP 2011055669 W 20110412
Abstract (en)
[origin: DE102010015522A1] The sensor (1) has a sensor chip (2) formed as a microelectromechanical system and provided with a sensor element (4), an electronic evaluation circuit (5) and an electronic oscillator (3). The sensor chip is separated into two regions (9, 10) and is fastened on a support element (7) by an adhesive (6) in one of the regions. The sensor element and the electronic oscillator are arranged in another region (9). The support element is formed as a punched sheet-metal, and the sensor element is formed as a membrane. A temperature sensor and a heat element are formed on the membrane.
IPC 8 full level
G01F 1/696 (2006.01)
CPC (source: EP KR US)
G01F 1/684 (2013.01 - KR US); G01F 1/6845 (2013.01 - EP KR US); G01F 1/692 (2013.01 - EP KR US); G01F 1/696 (2013.01 - EP KR US); G01F 5/00 (2013.01 - EP KR US)
Citation (search report)
See references of WO 2011128315A1
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
DOCDB simple family (publication)
DE 102010015522 A1 20110224; DE 102010015522 B4 20110901; CN 102844646 A 20121226; EP 2558826 A1 20130220; JP 2013525756 A 20130620; JP 5579320 B2 20140827; KR 101768736 B1 20170816; KR 20130103323 A 20130923; US 2013031959 A1 20130207; US 9134159 B2 20150915; WO 2011128315 A1 20111020
DOCDB simple family (application)
DE 102010015522 A 20100416; CN 201180019215 A 20110412; EP 11713804 A 20110412; EP 2011055669 W 20110412; JP 2013504233 A 20110412; KR 20127029951 A 20110412; US 201113641679 A 20110412