Global Patent Index - EP 2564153 A1

EP 2564153 A1 20130306 - OPTICAL DEVICE AND METHOD FOR INSPECTING STRUCTURED OBJECTS

Title (en)

OPTICAL DEVICE AND METHOD FOR INSPECTING STRUCTURED OBJECTS

Title (de)

OPTISCHE VORRICHTUNG UND VERFAHREN ZUR INSPEKTION VON STRUKTURIERTEN OBJEKTEN

Title (fr)

DISPOSITIF OPTIQUE ET PROCEDE D'INSPECTION D'OBJETS STRUCTURES

Publication

EP 2564153 A1 20130306 (FR)

Application

EP 11721347 A 20110419

Priority

  • FR 1053173 A 20100426
  • FR 2011050900 W 20110419

Abstract (en)

[origin: WO2011135231A1] The present invention relates to a microscope device for inspecting structured objects, said microscope device including: a camera (1); an optical imaging means (2) capable of producing, on the camera, an image of the object according to a field of view, and including a distal lens (3) arranged on the side of the object (4); and a low-coherence infrared interferometer (5) including a measurement beam capable of producing measurements by means of interferences between retroreflections of said measurement beam and at least one separate optical reference. The device also includes coupling means (7) for injecting the measurement beam into the optical imaging means in such a way that the beam passes through the distal lens, and the low-coherence infrared interferometer is balanced in such a way that only the measurement beam retroreflections, taking place at optical distances close to the optical distance covered by said beam to the object, produce measurements.

IPC 8 full level

G01B 9/02 (2006.01); G02B 21/00 (2006.01)

CPC (source: EP KR US)

G01B 9/02 (2013.01 - KR); G01B 9/02057 (2013.01 - EP US); G01B 9/0209 (2013.01 - EP US); G01B 9/04 (2013.01 - EP US); G01B 11/0675 (2013.01 - EP US); G01B 11/2441 (2013.01 - EP US); G02B 21/00 (2013.01 - KR); G02B 21/0016 (2013.01 - EP US)

Citation (search report)

See references of WO 2011135231A1

Citation (examination)

Designated contracting state (EPC)

AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

Designated extension state (EPC)

BA ME

DOCDB simple family (publication)

FR 2959305 A1 20111028; FR 2959305 B1 20140905; CN 102893121 A 20130123; CN 102893121 B 20151216; EP 2564153 A1 20130306; JP 2013528791 A 20130711; JP 2017096956 A 20170601; JP 6273142 B2 20180131; KR 101842291 B1 20180504; KR 20130083830 A 20130723; SG 184974 A1 20121129; US 2013038863 A1 20130214; US 9151941 B2 20151006; WO 2011135231 A1 20111103

DOCDB simple family (application)

FR 1053173 A 20100426; CN 201180021226 A 20110419; EP 11721347 A 20110419; FR 2011050900 W 20110419; JP 2013506713 A 20110419; JP 2016235402 A 20161202; KR 20127028050 A 20110419; SG 2012078218 A 20110419; US 201113643435 A 20110419