EP 2564273 A1 20130306 - SPECTRAL PURITY FILTER
Title (en)
SPECTRAL PURITY FILTER
Title (de)
SPEKTRALER REINIGUNGSFILTER
Title (fr)
FILTRE DE PURETÉ SPECTRALE
Publication
Application
Priority
- US 32842610 P 20100427
- EP 2011052573 W 20110222
Abstract (en)
[origin: WO2011134692A1] A spectral purity filter includes a body of material, through which a plurality of apertures extend. The apertures are arranged to suppress radiation having a first wavelength and to allow at least a portion of radiation having a second wavelength to be transmitted through the apertures. The second wavelength of radiation is shorter than the first wavelength of radiation. The body of material is formed from a material having a bulk reflectance of substantially greater than or equal to 70% at the first wavelength of radiation. The material has a melting point above 1000 °C.
IPC 8 full level
CPC (source: EP KR US)
G02B 5/208 (2013.01 - EP KR US); G03F 7/70191 (2013.01 - EP KR US); G03F 7/70575 (2013.01 - EP KR US); G03F 7/70891 (2013.01 - EP KR US); H01L 21/0274 (2013.01 - KR); H05G 2/008 (2013.01 - KR)
Citation (search report)
See references of WO 2011134692A1
Citation (examination)
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- SOER W A ET AL: "Grid spectral purity filters for suppression of infrared radiation in laser-produced plasma EUV sources", PROCEEDINGS OF THE SPIE - THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING SPIE - THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING USA, vol. 7271, 2009, ISSN: 0277-786X
- SCHUMANN J ET AL: "Polycrystalline iridium silicide films. Phase formation, electrical and optical properties", PHYSICA STATUS SOLIDI A GERMANY, vol. 145, no. 2, 16 October 1994 (1994-10-16), pages 429 - 439, ISSN: 0031-8965
- AMIOTTI M ET AL: "Optical properties of polycrystalline nickel silicides", PHYSICAL REVIEW B (CONDENSED MATTER) USA, vol. 42, no. 14, 15 November 1990 (1990-11-15), pages 8939 - 8946, ISSN: 1098-0121
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Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
DOCDB simple family (publication)
WO 2011134692 A1 20111103; CN 102859444 A 20130102; CN 102859444 B 20150408; EP 2564273 A1 20130306; JP 2013526044 A 20130620; JP 5727590 B2 20150603; KR 101776829 B1 20170908; KR 20130105292 A 20130925; SG 184557 A1 20121129; TW 201142541 A 20111201; TW I528117 B 20160401; US 2013038926 A1 20130214; US 9726989 B2 20170808
DOCDB simple family (application)
EP 2011052573 W 20110222; CN 201180020839 A 20110222; EP 11707372 A 20110222; JP 2013506551 A 20110222; KR 20127030943 A 20110222; SG 2012075628 A 20110222; TW 100109983 A 20110323; US 201113643265 A 20110222