EP 2569801 A1 20130320 - PROCESS FOR PRODUCING A CONDUCTING ELECTRODE
Title (en)
PROCESS FOR PRODUCING A CONDUCTING ELECTRODE
Title (de)
VERFAHREN ZUR HERSTELLUNG EINER LEITENDEN ELEKTRODE
Title (fr)
PROCÉDÉ DE RÉALISATION D'UNE ÉLECTRODE CONDUCTRICE
Publication
Application
Priority
- FR 1051832 A 20100315
- FR 2011050496 W 20110311
Abstract (en)
[origin: WO2011114046A1] The present invention relates to a process for producing a conducting electrode on a substrate, comprising the following steps: a layer (213) made of a dielectric is deposited; a protective layer (214) made of the nitride of a metal M is deposited on the dielectric layer; a functionalization layer (215) made of a material comprising a chemical species E is deposited, such that the free enthalpy of formation of the nitride of this species is less, in absolute value, than the free enthalpy of formation of the nitride of the metal M of said protective layer (214) over the temperature range between 0°C and 1200°C; and the assembly comprising said protective layer (214) and said funtionalization layer (215) is annealed (218) so that the species E diffuse from the functionalization layer (215) into the protective layer (214) and the nitrogen atoms migrate from the protective layer (214) into the functionalization layer (215).
IPC 8 full level
H01L 21/28 (2006.01); H01L 29/49 (2006.01)
CPC (source: EP US)
H01L 21/02107 (2013.01 - US); H01L 21/28088 (2013.01 - EP US); H01L 29/4966 (2013.01 - EP US); H01L 29/78 (2013.01 - US)
Citation (search report)
See references of WO 2011114046A1
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
DOCDB simple family (publication)
FR 2957458 A1 20110916; FR 2957458 B1 20120907; EP 2569801 A1 20130320; US 2013075832 A1 20130328; US 8609522 B2 20131217; WO 2011114046 A1 20110922
DOCDB simple family (application)
FR 1051832 A 20100315; EP 11712993 A 20110311; FR 2011050496 W 20110311; US 201113634350 A 20110311