EP 2572186 A1 20130327 - METHOD AND DEVICE FOR CHARACTERISING PYRAMIDAL SURFACE STRUCTURES ON A SUBSTRATE
Title (en)
METHOD AND DEVICE FOR CHARACTERISING PYRAMIDAL SURFACE STRUCTURES ON A SUBSTRATE
Title (de)
VERFAHREN UND VORRICHTUNG ZUR CHARAKTERISIERUNG VON PYRAMIDALEN OBERFLÄCHENSTRUKTUREN AUF EINEM SUBSTRAT
Title (fr)
PROCÉDÉ ET DISPOSITIF POUR CARACTÉRISER DES STRUCTURES DE SURFACE PYRAMIDALES SUR UN SUBSTRAT
Publication
Application
Priority
- DE 102010029133 A 20100519
- EP 2011054216 W 20110321
Abstract (en)
[origin: WO2011144374A1] The invention relates to a method and to a device for characterising pyramidal surface structures on a substrate. It contains the following method steps: irradiating the substrate surface in particular with laser light, capturing a light beam reflection pattern generated by the substrate surface, evaluating the reflection pattern, wherein the intensity of at least one directional pyramidal reflection maximum generated by lateral flanks of the pyramidal surface structure, the intensity of a diffuse reflection band generated by edges of the pyramidal surface structures and the intensity of a flaw maximum generated by flat flaws are determined.
IPC 8 full level
G01N 21/95 (2006.01)
CPC (source: EP)
G01N 21/55 (2013.01); G01N 21/95 (2013.01)
Citation (search report)
See references of WO 2011144374A1
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
DOCDB simple family (publication)
DE 102010029133 A1 20111124; EP 2572186 A1 20130327; WO 2011144374 A1 20111124
DOCDB simple family (application)
DE 102010029133 A 20100519; EP 11710176 A 20110321; EP 2011054216 W 20110321