EP 2577325 A1 20130410 - DEVICE FOR TOPOGRAPHICAL CHARACTERISATION AND CHEMICAL MAPPING OF SURFACES
Title (en)
DEVICE FOR TOPOGRAPHICAL CHARACTERISATION AND CHEMICAL MAPPING OF SURFACES
Title (de)
VORRICHTUNG FÜR TOPOGRAFISCHE CHARAKTERISIERUNG UND CHEMISCHE KARTIERUNG VON OBERFLÄCHEN
Title (fr)
DISPOSITIF DE CARACTÉRISATION TOPOGRAPHIQUE ET DE CARTOGRAPHIE CHIMIQUE DE SURFACES
Publication
Application
Priority
- FR 1002392 A 20100607
- IB 2011052423 W 20110601
Abstract (en)
[origin: WO2011154877A1] The invention relates to a device for characterising surfaces, characterised in that said device includes: a so-called imaging capillary (C1) for guiding near- or medium-infrared, visible, ultraviolet or X-ray electromagnetic radiation from or towards a surface (SE) to be characterised, said capillary having one so-called front end (EAC1), pointing towards said surface and having an opening having a micrometric or sub-micrometric diameter; and a micromechanical oscillator (DP) for inducing an oscillatory motion of said capillary relative to said surface. The invention further relates to the use of such a device for simultaneously acquiring topographic information and spatially resolved spectroscopic information on a surface to be characterised.
IPC 8 full level
G01Q 30/02 (2010.01); B82Y 35/00 (2011.01); G01N 23/223 (2006.01); G01Q 60/06 (2010.01); G01Q 60/20 (2010.01); G01Q 60/22 (2010.01); G21K 7/00 (2006.01)
CPC (source: EP)
G01Q 30/02 (2013.01); G01Q 60/06 (2013.01); G01Q 60/20 (2013.01); G01Q 60/22 (2013.01)
Citation (search report)
See references of WO 2011154877A1
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
DOCDB simple family (publication)
FR 2960975 A1 20111209; FR 2960975 B1 20130510; EP 2577325 A1 20130410; WO 2011154877 A1 20111215
DOCDB simple family (application)
FR 1002392 A 20100607; EP 11729731 A 20110601; IB 2011052423 W 20110601