EP 2577719 A1 20130410 - METHOD FOR REMOVING RESIDUAL EXTRINSIC IMPURITIES IN AN N TYPE ZNO OR ZNMGO SUBSTRATE, AND FOR ACCOMPLISHING P TYPE DOPING OF SAID SUBSTRATE
Title (en)
METHOD FOR REMOVING RESIDUAL EXTRINSIC IMPURITIES IN AN N TYPE ZNO OR ZNMGO SUBSTRATE, AND FOR ACCOMPLISHING P TYPE DOPING OF SAID SUBSTRATE
Title (de)
VERFAHREN ZUR ENTFERNUNG EXTRINSISCHER RESTUNREINHEITEN IN EINEM ZNO- ODER ZNMGO-SUBSTRAT DES TYPS N UND FÜR DIE ERREICHUNG EINER DOTIERUNG DES TYPS P BESAGTEN SUBSTRATS
Title (fr)
PROCÉDÉ POUR ÉLIMINER DES IMPURETÉS EXTRINSÈQUES RÉSIDUELLES DANS UN SUBSTRAT EN ZnO OU EN ZnMgO DE TYPE N, ET POUR RÉALISER UN DOPAGE DE TYPE P DE CE SUBSTRAT
Publication
Application
Priority
- FR 1054370 A 20100603
- EP 2011059130 W 20110601
Abstract (en)
[origin: WO2011151409A1] The invention relates to a method for purifying an n-type substrate made of ZnO and/or ZnMgO for reducing or removing the residual extrinsic impurities of the substrate with a view to p type doping at least a portion of the substrate, wherein a reactive species having a strong chemical affinity with at least one of the residual extrinsic impurities and/or capable of creating crystalline defects is introduced into at least one area of the substrate, said reactive species consisting of P, thus creating at least one so-called "getter" zone in the substrate, said zone being capable of trapping said residual extrinsic impurities and/or in which zone the residual extrinsic impurities are trapped; the substrate then annealed to diffuse the residual extrinsic impurities toward the "getter" zone, and/or out of the "getter" zone, preferably toward at least one surface of the substrate. The invention further relates to a method for preparing a substrate made of p-doped ZnO and/or ZnMgO including at least one step of purifying an n-type substrate made of ZnO and/or ZnMgO by the above purification method, wherein one or more reactive specie(s) not limited to phosphorus alone is/are employed.
IPC 8 full level
H01L 21/425 (2006.01); H01L 21/477 (2006.01)
CPC (source: EP US)
H01L 21/425 (2013.01 - EP US); H01L 21/46 (2013.01 - US); H01L 21/477 (2013.01 - EP US); H01L 33/0083 (2013.01 - EP US)
Citation (search report)
See references of WO 2011151409A1
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
DOCDB simple family (publication)
FR 2961013 A1 20111209; FR 2961013 B1 20130517; EP 2577719 A1 20130410; US 2013137214 A1 20130530; US 8852997 B2 20141007; WO 2011151409 A1 20111208
DOCDB simple family (application)
FR 1054370 A 20100603; EP 11722473 A 20110601; EP 2011059130 W 20110601; US 201113701621 A 20110601