EP 2584589 B1 20190508 - ILLUMINATING OPTICAL SYSTEM, EXPOSE DEVICE, AND DEVICE PRODUCTION METHOD
Title (en)
ILLUMINATING OPTICAL SYSTEM, EXPOSE DEVICE, AND DEVICE PRODUCTION METHOD
Title (de)
OPTISCHES BELEUCHTUNGSSYSTEM, BELICHTUNGSVORRICHTUNG UND VERFAHREN ZUR HERSTELLUNG DER VORRICHTUNG
Title (fr)
SYSTÈME OPTIQUE D'ILLUMINATION, DISPOSITIF D'EXPOSITION ET PROCÉDÉ DE PRODUCTION DU DISPOSITIF
Publication
Application
Priority
- JP 2010140024 A 20100619
- JP 2011063846 W 20110616
Abstract (en)
[origin: US2011310375A1] According to an embodiment, the illumination optical system for illuminating an illumination target surface with light from a light source is provided with a polarization converting member which converts a polarization state of incident light so as to form a pupil intensity distribution in a predetermined polarization state on an illumination pupil of the illumination optical system; and a phase modulating member which is arranged in the optical path on the illumination target surface side with respect to the polarization converting member and which transmits light from the pupil intensity distribution so as to convert linearly polarized light thereof polarized in a first direction, into required elliptically polarized light and maintain a polarization state of linearly polarized light polarized in a second direction (X-direction or Y-direction) obliquely intersecting with the first direction, in order to reduce influence of retardation caused by a subsequent optical system between the polarization converting member and the illumination target surface.
IPC 8 full level
G03F 7/20 (2006.01); G02B 27/28 (2006.01); H01L 21/027 (2006.01)
CPC (source: EP KR US)
G02B 27/0927 (2013.01 - US); G02B 27/286 (2013.01 - US); G03F 7/2022 (2013.01 - KR); G03F 7/70058 (2013.01 - US); G03F 7/70075 (2013.01 - US); G03F 7/701 (2013.01 - US); G03F 7/70108 (2013.01 - EP KR US); G03F 7/70191 (2013.01 - US); G03F 7/702 (2013.01 - US); G03F 7/70558 (2013.01 - US); G03F 7/70566 (2013.01 - EP KR US); H01L 21/0274 (2013.01 - KR); G02B 5/3083 (2013.01 - US)
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
DOCDB simple family (publication)
US 2011310375 A1 20111222; US 8934086 B2 20150113; EP 2584589 A1 20130424; EP 2584589 A4 20180117; EP 2584589 B1 20190508; EP 3547032 A1 20191002; JP 2012004465 A 20120105; KR 101789855 B1 20171025; KR 102045133 B1 20191114; KR 102159508 B1 20200924; KR 20130083897 A 20130723; KR 20170119736 A 20171027; KR 20190128749 A 20191118; US 10168620 B2 20190101; US 10520825 B2 20191231; US 2015092173 A1 20150402; US 2017108782 A1 20170420; US 2019086811 A1 20190321; US 9563130 B2 20170207; WO 2011158912 A1 20111222
DOCDB simple family (application)
US 201113161877 A 20110616; EP 11795814 A 20110616; EP 19163682 A 20110616; JP 2010140024 A 20100619; JP 2011063846 W 20110616; KR 20137001254 A 20110616; KR 20177029947 A 20110616; KR 20197033156 A 20110616; US 201414563275 A 20141208; US 201615390127 A 20161223; US 201816196530 A 20181120