EP 2586582 A1 20130501 - Wire saw control system and wire saw
Title (en)
Wire saw control system and wire saw
Title (de)
Drahtsägensteuerungssystem und Drahtsäge
Title (fr)
Système de commande de scie à fil et scie à fil
Publication
Application
Priority
EP 11187049 A 20111028
Abstract (en)
A wire saw control system (1) for operating a wire saw (100) is provided. The wire saw is adapted for cutting a wafer (304, 304, 306, 308) by moving the wire (230) relatively to the wafer with a selectable wire speed. The wire saw control system includes a camera (20) for inspecting the wire, and a camera control unit (25) for operating the camera in dependence of the wire speed. Furthermore, a wire saw including the wire saw control system is provided, and a method for inspecting a wire of a wire saw. The method includes moving the wire with a variable wire speed; and inspecting the wire in dependence of the wire speed, thereby obtaining an inspection result.
IPC 8 full level
B28D 5/00 (2006.01)
CPC (source: EP)
B28D 5/0064 (2013.01); B28D 5/045 (2013.01)
Citation (search report)
[A] WO 2011070386 A1 20110616 - APPLIED MATERIALS INC [US], et al
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
DOCDB simple family (publication)
EP 2586582 A1 20130501; EP 2586582 B1 20170301; CN 103085185 A 20130508; CN 103085185 B 20160706; CN 202685120 U 20130123; JP 2013094959 A 20130520
DOCDB simple family (application)
EP 11187049 A 20111028; CN 201110459141 A 20111223; CN 201120560605 U 20111223; JP 2012237407 A 20121029