EP 2586806 B1 20200429 - Modified novolak phenolic resin, making method, and resist composition
Title (en)
Modified novolak phenolic resin, making method, and resist composition
Title (de)
Modifiziertes Novolak-Phenolharz, Herstellungsverfahren und Resistzusammensetzung
Title (fr)
Résine phénolique novolaque modifiée, son procédé de fabrication et composition de réserve
Publication
Application
Priority
- JP 2011233901 A 20111025
- JP 2012176987 A 20120809
Abstract (en)
[origin: EP2586806A2] A modified novolak phenolic resin is obtained by reacting a novolak phenolic resin containing at least 50 wt% of p-cresol with a crosslinker. This method increases the molecular weight of the existing novolak phenolic resin containing at least 50 wt% of p-cresol to such a level that the resulting modified novolak phenolic resin has heat resistance enough for the photoresist application.
IPC 8 full level
C08G 8/00 (2006.01); C08L 61/00 (2006.01); C08L 61/04 (2006.01); C08L 61/20 (2006.01); G03F 7/00 (2006.01); H01B 3/00 (2006.01); H05B 33/00 (2006.01); H05K 1/00 (2006.01)
CPC (source: EP KR US)
C08G 8/00 (2013.01 - EP KR US); C08G 8/28 (2013.01 - KR US); C08G 14/10 (2013.01 - US); C08G 14/12 (2013.01 - KR); C08L 61/00 (2013.01 - EP KR); C08L 61/04 (2013.01 - EP KR); C08L 61/20 (2013.01 - EP KR); G03F 7/0045 (2013.01 - KR); G03F 7/0226 (2013.01 - US); G03F 7/023 (2013.01 - EP KR US); G03F 7/0236 (2013.01 - EP KR US); G03F 7/038 (2013.01 - US); G03F 7/0382 (2013.01 - US)
Designated contracting state (EPC)
DE FR GB
DOCDB simple family (publication)
EP 2586806 A2 20130501; EP 2586806 A3 20130918; EP 2586806 B1 20200429; JP 2013108056 A 20130606; JP 5831388 B2 20151209; KR 101876817 B1 20180710; KR 20130045224 A 20130503; TW 201331270 A 20130801; TW I582138 B 20170511; US 2013101937 A1 20130425; US 2015087792 A1 20150326; US 9012122 B2 20150421; US 9777102 B2 20171003
DOCDB simple family (application)
EP 12189273 A 20121019; JP 2012176987 A 20120809; KR 20120119254 A 20121025; TW 101139256 A 20121024; US 201213658844 A 20121024; US 201414560358 A 20141204