EP 2588405 A1 20130508 - METHOD FOR FUNCTIONALISING FLUID LINES CONTAINED IN A MICROMECHANICAL DEVICE, MICROMECHANICAL DEVICE INCLUDING FUNCTIONALISED LINES, AND METHOD FOR MANUFACTURING SAME
Title (en)
METHOD FOR FUNCTIONALISING FLUID LINES CONTAINED IN A MICROMECHANICAL DEVICE, MICROMECHANICAL DEVICE INCLUDING FUNCTIONALISED LINES, AND METHOD FOR MANUFACTURING SAME
Title (de)
VERFAHREN ZUR FUNKTIONALISIERUNG VON FLÜSSIGKEITSLEITUNGEN EINER MIKROMECHANISCHEN VORRICHTUNG, MIKROMECHANISCHE VORRICHTUNG MIT FUNKTIONALISIERTEN LEITUNGEN UND HERSTELLUNGSVERFAHREN DAFÜR
Title (fr)
PROCEDE DE FONCTIONNALISATION DES VEINES FLUIDIQUES CONTENUES DANS UN DISPOSITIF MICROMECANIQUE, DISPOSITIF MICROMECANIQUE COMPRENANT DES VEINES FONCTIONNALISEES ET SON PROCEDE DE REALISATION
Publication
Application
Priority
- FR 1002706 A 20100629
- IB 2011052865 W 20110629
Abstract (en)
[origin: WO2012001642A1] The present invention relates to a method for functionalising fluid lines (1b) in a micromechanical device, the walls of which include an opaque layer. For this purpose, the invention provides a method for functionalising a micromechanical device provided with a fluid line including a peripheral wall (5) having a surface (2) outside the line and an inner surface (3) defining a space (1b) in which a fluid can circulate, the peripheral wall at least partially including a silicon layer (5a). The method includes the following steps: a) providing a device, the peripheral wall (5) of which at least partially includes a silicon layer (5a) having, at least locally, a thickness (e) of more than 100 nm and less than 200 nm, advantageously of 160 to 180 nm; c) silanising at least the inner surface of the fluid line; d) the localised, selective photo-deprotection on at least the inner surface of the silanised device by exposing the peripheral wall (5) at the point at which said wall has a thickness (e) of more than 100 nm and less than 200 nm, advantageously of 160 to 180 nm.
IPC 8 full level
B81C 1/00 (2006.01)
CPC (source: EP US)
B81C 1/00206 (2013.01 - EP US); F04B 19/006 (2013.01 - EP US); G03F 7/24 (2013.01 - US); B81B 2201/0214 (2013.01 - EP US); B81B 2201/058 (2013.01 - EP US); B81B 2201/06 (2013.01 - EP US); B81C 2201/0154 (2013.01 - EP US)
Citation (search report)
See references of WO 2012001642A1
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
DOCDB simple family (publication)
FR 2961899 A1 20111230; FR 2961899 B1 20130329; CN 103025648 A 20130403; CN 103025648 B 20151216; EP 2588405 A1 20130508; US 2013149196 A1 20130613; US 8968673 B2 20150303; WO 2012001642 A1 20120105
DOCDB simple family (application)
FR 1002706 A 20100629; CN 201180032552 A 20110629; EP 11738320 A 20110629; IB 2011052865 W 20110629; US 201113805491 A 20110629