EP 2590890 A1 20130515 - PIEZO-ELECTRIC BASED MICRO-ELECTRO-MECHANICAL LENS ACTUATION SYSTEM
Title (en)
PIEZO-ELECTRIC BASED MICRO-ELECTRO-MECHANICAL LENS ACTUATION SYSTEM
Title (de)
MIKROELEKTROMECHANISCHES LINSENAKTUATORSYSTEM AUF PIEZOELEKTRISCHER BASIS
Title (fr)
SYSTÈME D'ACTIONNEMENT DE LENTILLE MICRO-ÉLECTRO-MÉCANIQUE À BASE DE PIÉZOÉLECTRIQUE
Publication
Application
Priority
- AU 2010902976 A 20100705
- AU 2011000837 W 20110704
Abstract (en)
[origin: WO2012003529A1] Disclosed is a piezo-electrically actuated micro-mechanical deformable member comprising a corrugated longitudinal beam (521) formed in a substrate, and having a first anchored end (502) and a second end (509), as well as a plurality of piezoelectric film (PZET) actuating segments (522, 523, 524) formed in or on at least some grooves and ridges of the corrugated beam, the beam (521) being configured to assume one of a number of different geometric configurations depending upon which of a corresponding set of electric actuation signals (105) are applied to the PZET elements, the electric actuation signals establishing corresponding electric fields in the associated PZET segments to thereby deform the member.
IPC 8 full level
B81B 3/00 (2006.01); B81B 5/00 (2006.01); G02B 26/08 (2006.01); H01L 41/083 (2006.01)
CPC (source: EP US)
G02B 13/0075 (2013.01 - US); G02B 26/0858 (2013.01 - US); G02B 26/0875 (2013.01 - EP US); H10N 30/202 (2023.02 - US); H10N 30/2044 (2023.02 - EP US); H10N 30/206 (2023.02 - EP US)
Citation (search report)
See references of WO 2012003529A1
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
DOCDB simple family (publication)
WO 2012003529 A1 20120112; CN 103180239 A 20130626; CN 103180239 B 20160106; EP 2590890 A1 20130515; HK 1182081 A1 20131122; US 2013114149 A1 20130509; US 8866364 B2 20141021
DOCDB simple family (application)
AU 2011000837 W 20110704; CN 201180040794 A 20110704; EP 11803005 A 20110704; HK 13109488 A 20130813; US 201113808341 A 20110704