EP 2598453 A1 20130605 - DEVICE AND METHOD FOR SUBSTRATE PROCESSING
Title (en)
DEVICE AND METHOD FOR SUBSTRATE PROCESSING
Title (de)
VORRICHTUNG UND VERFAHREN ZUR SUBSTRATPROZESSIERUNG
Title (fr)
DISPOSITIF ET PROCÉDÉ DE TRAITEMENT DE SUBSTRATS
Publication
Application
Priority
- EP 10154992 A 20100301
- EP 2011052575 W 20110222
- EP 11709348 A 20110222
Abstract (en)
[origin: EP2368860A1] Device for processing a substrate in a processing plant, comprises at least one process tool (3) exhibiting two oppositely arranged substrate planes, that are oriented at least approximately perpendicular, and arranged in at least one processing area (2). The device is adapted for processing at least two substrates simultaneously in the processing area with the process tool. The substrates are arranged in the substrate planes such that the coatings of the substrates face each other and a quasi-closed process space is formed between the substrates at least during the processing. An independent claim is also included for processing coated substrates in a processing plant comprising at least two substrates in the processing area arranged in the oppositely arranged substrate planes, where the substrate exhibits coatings.
IPC 8 full level
C03C 17/00 (2006.01); B65G 49/00 (2006.01); C23C 14/50 (2006.01); C23C 14/56 (2006.01); C23C 16/50 (2006.01); C23C 16/54 (2006.01); H01L 31/20 (2006.01)
CPC (source: EP KR US)
B65G 49/00 (2013.01 - KR); B65G 49/063 (2013.01 - EP US); C03C 17/00 (2013.01 - KR); C23C 14/50 (2013.01 - EP US); C23C 14/56 (2013.01 - EP US); C23C 16/54 (2013.01 - KR); H01L 31/0322 (2013.01 - EP US); H01L 31/20 (2013.01 - KR); Y02E 10/541 (2013.01 - EP US)
Citation (search report)
See references of WO 2011107373A1
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
DOCDB simple family (publication)
EP 2368860 A1 20110928; CN 102770385 A 20121107; EA 201290845 A1 20130228; EP 2598453 A1 20130605; JP 2013521408 A 20130610; KR 20130024884 A 20130308; US 2013059431 A1 20130307; WO 2011107373 A1 20110909; ZA 201206144 B 20130424
DOCDB simple family (application)
EP 10154992 A 20100301; CN 201180012095 A 20110222; EA 201290845 A 20110222; EP 11709348 A 20110222; EP 2011052575 W 20110222; JP 2012555364 A 20110222; KR 20127022885 A 20110222; US 201113581982 A 20110222; ZA 201206144 A 20120815