EP 2599105 A1 20130605 - METHOD FOR PRODUCING A CAPACITOR INCLUDING AN ARRAY OF NANOCAPACITORS
Title (en)
METHOD FOR PRODUCING A CAPACITOR INCLUDING AN ARRAY OF NANOCAPACITORS
Title (de)
VERAHREN ZUR HERSTELLUNG EINES KONDENSATORS MIT EINER ANORDNUNG AUS NANOKONDENSATOREN
Title (fr)
PROCEDE DE REALISATION D'UN CONDENSATEUR COMPRENANT UN RESEAU DE NANO-CAPACITES
Publication
Application
Priority
- FR 1003212 A 20100730
- IB 2011053374 W 20110728
Abstract (en)
[origin: WO2012014177A1] The invention relates to a method for producing a capacitor including an array of nanocapacitors, in which the following steps are performed using a mould having a sealed surface, referred to as the lower surface, and a top surface through which a network of pores extend: (a) filling the pores of the mould and covering the top surface of said mould with an electrically conductive material, in order to form a structure consisting of an array of nanoscale objects connected by a single substrate; (b) removing the mould; (c) depositing, on the outline of the structure (204) obtained at the end of step (b), at least one bilayer consisting of a first layer of an electrically insulating material (205) and a second layer of an electrically conductive material (207); and then (d) locally removing said at least one bilayer deposited in step (c) from the substrate (202) in order to form the electrical contact.
IPC 8 full level
H01L 21/02 (2006.01); H01G 4/01 (2006.01)
CPC (source: EP US)
B05D 5/12 (2013.01 - US); B82Y 10/00 (2013.01 - EP US); H01G 4/01 (2013.01 - EP US); H01G 4/33 (2013.01 - EP US); H01G 4/38 (2013.01 - EP US); H01G 13/00 (2013.01 - US); H01L 28/90 (2013.01 - EP US); B82Y 40/00 (2013.01 - US); H01G 11/10 (2013.01 - US)
Citation (search report)
See references of WO 2012014177A1
Citation (examination)
JP 2010156005 A 20100715 - KANAGAWA KAGAKU GIJUTSU AKAD
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
DOCDB simple family (publication)
WO 2012014177 A1 20120202; EP 2599105 A1 20130605; FR 2963476 A1 20120203; FR 2963476 B1 20120824; US 2013224394 A1 20130829; US 9165722 B2 20151020
DOCDB simple family (application)
IB 2011053374 W 20110728; EP 11749250 A 20110728; FR 1003212 A 20100730; US 201113813166 A 20110728