EP 2600392 B1 20191211 - LASER PROCESSING METHOD
Title (en)
LASER PROCESSING METHOD
Title (de)
LASERVERARBEITUNGSVERFAHREN
Title (fr)
PROCÉDÉ DE TRAITEMENT PAR LASER
Publication
Application
Priority
- JP 2010167426 A 20100726
- JP 2011066322 W 20110719
Abstract (en)
[origin: US2012129348A1] A laser processing method of converging laser light into an object to be processed made of silicon so as to form a modified region and etching the object along the modified region so as to form the object with a through hole comprises a laser light converging step of converging the laser light at the object so as to form the modified region along a part corresponding to the through hole in the object; an etch resist film producing step of producing an etch resist film resistant to etching on an outer surface of the object after the laser light converging step; and an etching step of etching the object so as to advance the etching selectively along the modified region and form the through hole after the etch resist film producing step; while the laser light converging step exposes the modified region to the outer surface of the object.
IPC 8 full level
H01L 21/306 (2006.01); B23K 26/00 (2014.01); B23K 26/382 (2014.01); B23K 26/38 (2014.01)
CPC (source: EP KR US)
B23K 26/382 (2015.10 - EP US); B23K 26/384 (2015.10 - EP KR US); B23K 26/40 (2013.01 - EP KR US); B23K 26/55 (2015.10 - EP KR US); H01L 21/30604 (2013.01 - EP US); H01L 21/30608 (2013.01 - EP KR US); H01L 21/486 (2013.01 - EP KR US); B23K 2101/35 (2018.07 - EP KR US); B23K 2103/50 (2018.07 - EP KR US)
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
DOCDB simple family (publication)
US 2012129348 A1 20120524; US 8685269 B2 20140401; CN 103026470 A 20130403; CN 103026470 B 20160803; EP 2600392 A1 20130605; EP 2600392 A4 20161214; EP 2600392 B1 20191211; JP 2012028645 A 20120209; JP 5702556 B2 20150415; KR 20130088147 A 20130807; TW 201234471 A 20120816; TW I536441 B 20160601; WO 2012014711 A1 20120202
DOCDB simple family (application)
US 201113388717 A 20110719; CN 201180036527 A 20110719; EP 11812303 A 20110719; JP 2010167426 A 20100726; JP 2011066322 W 20110719; KR 20137004728 A 20110719; TW 100126367 A 20110726