EP 2601327 A1 20130612 - VACUUM SUBSTRATE TREATMENT SYSTEM HAVING AN EMERGENCY COOLING DEVICE
Title (en)
VACUUM SUBSTRATE TREATMENT SYSTEM HAVING AN EMERGENCY COOLING DEVICE
Title (de)
VAKUUM-SUBSTRATBEHANDLUNGSANLAGE MIT NOTKÜHLEINRICHTUNG
Title (fr)
INSTALLATION DE TRAITEMENT D'UN SUBSTRAT SOUS VIDE COMPRENANT UN DISPOSITIF DE REFROIDISSEMENT DE SECOURS
Publication
Application
Priority
EP 2011066152 W 20110916
Abstract (en)
[origin: WO2013037423A1] The invention relates to a vacuum substrate treatment system, comprising a system chamber having at least one system component that can be cooled and a cooling device for the system component that can be cooled. Said cooling device comprises a coolant circuit, which is connected to the system component that can be cooled and has at least one first coolant pump that can be driven by a first drive device. The invention is characterised in that the cooling device further comprises an emergency cooling device, which comprises a branch of the coolant circuit extending parallel to the first coolant pump and in which at least one second coolant pump is arranged that can be driven by a second drive device, and the second drive device can be operated with compressed gas.
IPC 8 full level
C23C 14/00 (2006.01); H01J 37/00 (2006.01); H01L 21/67 (2006.01)
CPC (source: EP)
C23C 14/00 (2013.01); H01J 37/30 (2013.01); H01L 21/67109 (2013.01); H01J 37/32522 (2013.01); H01J 2237/002 (2013.01)
Citation (search report)
See references of WO 2013037423A1
Citation (examination)
- JP H01230986 A 19890914 - EAGLE IND CO LTD
- "Air Cooled Water System for Vacuum Furnaces", BULLETIN VAC-1M-9-99, 1 March 2003 (2003-03-01), https://www.google.com/search?q=inurl:http//:drycoolers.com/sites/default/files/vac_series_indd2.pdf&as_qdr=y15, pages 1 - 2, XP055101985, Retrieved from the Internet <URL:http://drycoolers.com/sites/default/files/vac_series_indd2.pdf> [retrieved on 20140213]
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
DOCDB simple family (publication)
DOCDB simple family (application)
EP 2011066152 W 20110916; EP 11757634 A 20110916