EP 2601551 A1 20130612 - AUTOFOCUS SYSTEM
Title (en)
AUTOFOCUS SYSTEM
Title (de)
AUTOFOKUSSYSTEM
Title (fr)
SYSTÈME AUTOFOCUS
Publication
Application
Priority
- DE 102010033249 A 20100803
- EP 2011060081 W 20110617
Abstract (en)
[origin: WO2012016753A1] Microscopic device for imaging a sample substance (1), comprising: - a microscopic imaging system, and - means for automatically displacing the focal plane along the optical axis (4) of the imaging system into a Z-position, in which the sample substance (1) to be imaged is situated, characterized by - a sample beam (10) which emerges from an interferometer and is directed in the Z-direction through the sample substance (1), wherein the interference signals arising as a result of interference of the light of the sample beam (10) that is reflected or backscattered from optically active interfaces and/or structures with the reference beam of the interferometer are provided for determining the Z-positions of the interfaces and/or structures of the sample, - an evaluation device for determining the Z-position of the sample substance (1), - an adjusting device, designed for displacing the focal plane and the sample substance (1) relative to one another until the sample substance (1) is situated in the focal plane, and - a drive unit connected to the evaluation device and the adjusting device and serving for generating actuating commands for automatically displacing the focal plane into the Z-position determined.
IPC 8 full level
G02B 21/24 (2006.01); G02B 21/36 (2006.01)
CPC (source: EP)
G02B 21/245 (2013.01); G02B 21/367 (2013.01)
Citation (search report)
See references of WO 2012016753A1
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
DOCDB simple family (publication)
DE 102010033249 A1 20120209; EP 2601551 A1 20130612; WO 2012016753 A1 20120209
DOCDB simple family (application)
DE 102010033249 A 20100803; EP 11733817 A 20110617; EP 2011060081 W 20110617