EP 2606503 A1 20130626 - PLASMA PROCESSES AT ATMOSPHERIC PRESSURE
Title (en)
PLASMA PROCESSES AT ATMOSPHERIC PRESSURE
Title (de)
PLASMA-PROZESSE BEI ATMOSPHÄRENDRUCK
Title (fr)
TRAITEMENTS PAR PLASMA À LA PRESSION ATMOSPHÉRIQUE
Publication
Application
Priority
- DE 102010039365 A 20100816
- EP 2011064075 W 20110816
Abstract (en)
[origin: WO2012022738A1] The invention relates to an apparatus for treatment of surfaces of a substrate by means of a plasma. The apparatus comprises a plasma source which is designed to produce a plasma and to emit into a plasma area with a longitudinal plasma extent which runs along a main movement component of the plasma, an at least partially conductive first holding apparatus, which is designed to hold a first workpiece, and a voltage source which is connected to the first holding apparatus and is designed to produce a first acceleration voltage, and to apply this to the first holding apparatus. The first holding apparatus is arranged and designed relative to the plasma source to place the first workpiece such that the plasma reaches the first workpiece when the first acceleration voltage is applied.
IPC 8 full level
H01J 37/32 (2006.01); H05H 1/42 (2006.01)
CPC (source: EP US)
H01J 37/32 (2013.01 - US); H01J 37/32706 (2013.01 - EP US); H01J 37/32825 (2013.01 - EP US); H05H 1/42 (2013.01 - US)
Citation (search report)
See references of WO 2012022738A1
Citation (examination)
DE 1818460 U 19600922 - UNION CARBIDE CORP [US]
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
DOCDB simple family (publication)
DE 102010039365 A1 20120216; DE 102010039365 B4 20160324; EP 2606503 A1 20130626; US 2013213576 A1 20130822; WO 2012022738 A1 20120223
DOCDB simple family (application)
DE 102010039365 A 20100816; EP 11758137 A 20110816; EP 2011064075 W 20110816; US 201113817537 A 20110816