EP 2611948 A2 20130710 - METHOD FOR DEPOSITING NANOPARTICLES ON SUBSTRATES
Title (en)
METHOD FOR DEPOSITING NANOPARTICLES ON SUBSTRATES
Title (de)
VERFAHREN ZUR ABSCHEIDUNG VON NANOPARTIKELN AUF SUBSTRATEN
Title (fr)
PROCÉDÉ DE DÉPÔT DE NANOPARTICULES SUR DES SUBSTRATS
Publication
Application
Priority
- EP 10174984 A 20100901
- EP 2011065144 W 20110901
- EP 11752208 A 20110901
Abstract (en)
[origin: WO2012028695A2] The present invention is related to a method for depositing nanoparticles on a substrate, wherein the method comprises the steps of: forming a mixture of a precursor and a substrate, said precursor being in a liquid or a solid phase, said substrate being a nanoscopic or microscopic substrate, said mixture being formed outside a reactor after which said mixture is introduced into a reactor, or introducing said precursor and said substrate into a reactor and forming said mixture in said reactor, - exposing said mixture of said precursor and said substrate to a plasma in said reactor, wherein the temperature of the plasma during the step of exposing said mixture of said precursor and said substrate to a plasma is lower than 300°C.
IPC 8 full level
C23C 18/08 (2006.01); C23C 18/12 (2006.01); C23C 18/14 (2006.01)
CPC (source: EP US)
C23C 18/08 (2013.01 - EP US); C23C 18/1216 (2013.01 - EP); C23C 18/127 (2013.01 - EP); C23C 18/1291 (2013.01 - EP); C23C 18/145 (2019.04 - EP US)
Citation (search report)
See references of WO 2012028695A2
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
DOCDB simple family (publication)
WO 2012028695 A2 20120308; WO 2012028695 A3 20130328; EP 2611948 A2 20130710
DOCDB simple family (application)
EP 2011065144 W 20110901; EP 11752208 A 20110901