EP 2612343 A1 20130710 - SPUTTERING DEVICE WITH A TUBULAR TARGET
Title (en)
SPUTTERING DEVICE WITH A TUBULAR TARGET
Title (de)
SPUTTEREINRICHTUNG MIT ROHRFÖRMIGEM TARGET
Title (fr)
DISPOSITIF DE PULVÉRISATION CATHODIQUE À CIBLE TUBULAIRE
Publication
Application
Priority
- DE 102010040267 A 20100903
- EP 2011064559 W 20110824
Abstract (en)
[origin: WO2012028515A1] The invention relates to a sputtering device with a tubular target, comprising a holding device with a supporting shaft, which has a shaft flange, which is connected to a target tube detachably and in a water-tight manner by means of a clamping device, wherein that end of the target tube which faces the shaft flange of the supporting shaft is without a flange and a spacer ring is arranged detachably on the outer side thereof in a predetermined position, said spacer ring being held by a form-fitting connection at a minimum distance from the end of the target tube, wherein the clamping device is formed from the shaft flange of the supporting shaft, the spacer ring and a clamping ring, which engages over the shaft flange and the spacer ring and comprises at least two pieces, and wherein at least one sealing element is arranged between the outer side and/or the end side of the target tube, on one side, and an opposite sealing face of the shaft flange on the other side.
IPC 8 full level
H01J 37/34 (2006.01)
CPC (source: EP US)
C23C 14/3407 (2013.01 - EP US); H01J 37/3405 (2013.01 - EP US); H01J 37/342 (2013.01 - EP US); H01J 37/3435 (2013.01 - EP US)
Citation (search report)
See references of WO 2012028515A1
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
DOCDB simple family (publication)
DE 102010040267 A1 20120308; DE 102010040267 B4 20140717; EP 2612343 A1 20130710; US 2013299346 A1 20131114; WO 2012028515 A1 20120308
DOCDB simple family (application)
DE 102010040267 A 20100903; EP 11748398 A 20110824; EP 2011064559 W 20110824; US 201113817982 A 20110824