EP 2619629 A1 20130731 - LITHOGRAPHY SYSTEM ARRANGED ON A FOUNDATION, AND METHOD FOR ARRANGING A LITHOGRAPHY SYSTEM ON SAID FOUNDATION
Title (en)
LITHOGRAPHY SYSTEM ARRANGED ON A FOUNDATION, AND METHOD FOR ARRANGING A LITHOGRAPHY SYSTEM ON SAID FOUNDATION
Title (de)
AUF EINEM UNTERGRUND ANGEORDNETES LITHOGRAFIESYSTEM UND VERFAHREN ZUR ANORDNUNG EINES LITHOGRAFIESYSTEMS AUF DIESEM UNTERGRUND
Title (fr)
SYSTÈME LITHOGRAPHIQUE AGENCÉ SUR UNE FONDATION, ET PROCÉDÉ POUR L'AGENCEMENT D'UN SYSTÈME LITHOGRAPHIQUE SUR LADITE FONDATION
Publication
Application
Priority
- US 38469010 P 20100920
- NL 2005374 A 20100920
- NL 2011050630 W 20110920
Abstract (en)
[origin: WO2012039606A1] The invention relates to a vibration isolation requiring system, such as a lithography system, arranged on a foundation (100), for example part of the floor in the room where the lithography system is arranged, and a method for arranging a lithography system on a foundation. The lithography system is arranged on top of a rigid or solid base plate (110), wherein said base plate having one or more struts (150) attached thereto for placing the lithography system onto the foundation, wherein the one or more strutsare arranged at a side of the base plate facing the foundation, and wherein the base plate is provided with a cut-out or an opening for mounting equipment (330) underneath a vacuum chamber of the lithography system.
IPC 8 full level
G03F 7/20 (2006.01); F16F 15/04 (2006.01)
CPC (source: EP KR)
F16F 15/046 (2013.01 - KR); G03F 7/70833 (2013.01 - EP KR); G03F 7/709 (2013.01 - EP KR); H01L 21/0274 (2013.01 - KR)
Citation (search report)
See references of WO 2012039606A1
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
DOCDB simple family (publication)
WO 2012039606 A1 20120329; WO 2012039606 A4 20120518; WO 2012039606 A9 20120628; EP 2619629 A1 20130731; JP 2013543254 A 20131128; KR 20130132769 A 20131205; NL 2005374 C2 20120322; TW 201217915 A 20120501
DOCDB simple family (application)
NL 2011050630 W 20110920; EP 11761728 A 20110920; JP 2013529091 A 20110920; KR 20137006705 A 20110920; NL 2005374 A 20100920; TW 100133722 A 20110920