EP 2622411 B1 20151104 - OPTICAL SYSTEM OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS AND METHOD OF REDUCING IMAGE PLACEMENT ERRORS
Title (en)
OPTICAL SYSTEM OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS AND METHOD OF REDUCING IMAGE PLACEMENT ERRORS
Title (de)
OPTISCHES SYSTEM EINES MIKROLITHOGRAFISCHEN PROJEKTIONSBELICHTUNGSGERÄTS UND VERFAHREN ZUR MINIMIERUNG VON BILDPOSITIONIERUNGSFEHLERN
Title (fr)
SYSTÈME OPTIQUE D'UN APPAREIL D'EXPOSITION PAR PROJECTION MICROLITHOGRAPHIQUE ET PROCÉDÉ DE RÉDUCTION D'ERREURS DE DISPOSITION D'IMAGE
Publication
Application
Priority
EP 2010005901 W 20100928
Abstract (en)
[origin: WO2012041339A1] A method of reducing image placement errors in a microlithographic projection exposure apparatus comprises the steps of providing a mask (16), a light sensitive layer (22) and a microlithographic projection exposure apparatus (10) which images features (19) contained in the mask (16) onto the light sensitive surface (22) using projection light. In a next step image placement errors associated with an image of the features (10) formed on the light sensitive surface (22) are determined either by simulation or metrologically. Then an input state of polarization of the projection light is changed to an elliptical output state of polarization which is selected such that the image placement errors are reduced.
IPC 8 full level
G03F 7/20 (2006.01)
CPC (source: EP KR US)
G03F 7/70116 (2013.01 - EP KR US); G03F 7/70141 (2013.01 - KR US); G03F 7/70466 (2013.01 - EP KR US); G03F 7/70566 (2013.01 - EP KR US); G03F 7/70633 (2013.01 - EP KR US); H01L 21/0273 (2013.01 - KR); H01L 21/0274 (2013.01 - KR)
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK SM TR
DOCDB simple family (publication)
WO 2012041339 A1 20120405; CN 103154818 A 20130612; CN 103154818 B 20150715; EP 2622411 A1 20130807; EP 2622411 B1 20151104; JP 2013540348 A 20131031; JP 5507016 B2 20140528; KR 101884486 B1 20180801; KR 20130119924 A 20131101; TW 201234122 A 20120816; TW I567501 B 20170121; US 2013188160 A1 20130725; US 9785052 B2 20171010
DOCDB simple family (application)
EP 2010005901 W 20100928; CN 201080069309 A 20100928; EP 10765951 A 20100928; JP 2013530572 A 20100928; KR 20137010614 A 20100928; TW 100134520 A 20110926; US 201313792599 A 20130311