EP 2622626 B1 20170125 - PARTICLE-OPTICAL SYSTEMS AND ARRANGEMENTS AND PARTICLE-OPTICAL COMPONENTS FOR SUCH SYSTEMS AND ARRANGEMENTS
Title (en)
PARTICLE-OPTICAL SYSTEMS AND ARRANGEMENTS AND PARTICLE-OPTICAL COMPONENTS FOR SUCH SYSTEMS AND ARRANGEMENTS
Title (de)
TEILCHENOPTISCHE SYSTEME UND ANORDNUNGEN SOWIE TEILCHENOPTISCHE KOMPONENTEN FÜR DERARTIGE SYSTEME UND ANORDNUNGEN
Title (fr)
SYSTÈMES ET DISPOSITIFS OPTIQUES À PARTICULES ET COMPOSANTS OPTIQUES À PARTICULES POUR DE TELS SYSTÈMES ET DISPOSITIFS
Publication
Application
Priority
- US 40412610 P 20100928
- EP 2011004777 W 20110923
Abstract (en)
[origin: WO2012041464A1] The present invention concerns a charged-particle multi-beamlet system that comprises a source of charged particles (301); a first multi-aperture plate (320) having plural apertures disposed in a charged particle beam path of the system downstream of the source; a first multi-aperture selector plate (313) having plural apertures; a carrier (340), wherein the first multi-aperture selector plate is mounted on the carrier; and an actuator (350) configured to move the carrier such that the first multi-aperture selector plate is disposed in the charged particle beam path of the system downstream of the source in a first mode of operation of the system, and such that the first multi-aperture selector plate is disposed outside of the charged particle beam path in a second mode of operation of the system. The source, the first multi-aperture plate and the carrier of the system are arranged such that a first number of charged particle beamlets is generated at a position downstream of both the first multi-aperture plate and the first multi-aperture selector plate in the first mode of operation, and that a second number of charged particle beamlets is generated at the position in the second mode of operation, wherein the first number of beamlets differs from the second number of beamlets.
IPC 8 full level
H01J 37/28 (2006.01); H01J 37/09 (2006.01); H01J 37/317 (2006.01)
CPC (source: CN EP US)
B82Y 10/00 (2013.01 - CN EP US); B82Y 40/00 (2013.01 - CN EP US); H01J 37/09 (2013.01 - CN US); H01J 37/21 (2013.01 - CN US); H01J 37/28 (2013.01 - CN EP US); H01J 37/3177 (2013.01 - CN EP US); H01J 2237/0453 (2013.01 - CN EP US); H01J 2237/0458 (2013.01 - CN EP US); H01J 2237/0492 (2013.01 - CN US); H01J 2237/1205 (2013.01 - CN EP US)
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
DOCDB simple family (publication)
WO 2012041464 A1 20120405; CN 103238202 A 20130807; CN 103238202 B 20161109; CN 107104029 A 20170829; CN 107104029 B 20201009; EP 2622626 A1 20130807; EP 2622626 B1 20170125; TW 201230129 A 20120716; TW 201628044 A 20160801; TW I539482 B 20160621; TW I609400 B 20171221; US 2013187046 A1 20130725; US 2016155603 A1 20160602; US 9384938 B2 20160705; US 9653254 B2 20170516
DOCDB simple family (application)
EP 2011004777 W 20110923; CN 201180057076 A 20110923; CN 201610905526 A 20110923; EP 11761288 A 20110923; TW 100134824 A 20110927; TW 105110733 A 20110927; US 201113825820 A 20110923; US 201615016743 A 20160205