EP 2622947 B1 20141112 - METHOD AND DEVICE FOR FORMING A NEUTRAL PLASMA BEAM
Title (en)
METHOD AND DEVICE FOR FORMING A NEUTRAL PLASMA BEAM
Title (de)
VERFAHREN UND VORRICHTUNG ZUR FORMUNG EINES NEUTRALISCHEN PLASMASTRAHLS
Title (fr)
PROCÉDÉ ET DISPOSITIF POUR LA FORMATION D'UN FAISCEAU PLASMA NEUTRE
Publication
Application
Priority
- FR 1057890 A 20100930
- FR 2011052090 W 20110914
Abstract (en)
[origin: WO2012042143A1] The invention relates to a method and device for forming a plasma beam. According to the invention: the quality of the electroneutrality of the plasma beam (PB) is detected (in 12 and/or 13); and the alternating polarisation potentials of the extraction and acceleration grid (4) are adjusted such that the plasma beam (PB) is at least approximately electrically neutral.
IPC 8 full level
H05H 1/24 (2006.01); H01J 27/16 (2006.01); H05H 1/54 (2006.01)
CPC (source: EP US)
F03H 1/0025 (2013.01 - EP US); H01J 27/024 (2013.01 - EP US); H01J 27/16 (2013.01 - EP US); H05H 1/24 (2013.01 - EP US); H05H 1/54 (2013.01 - EP US)
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
DOCDB simple family (publication)
WO 2012042143 A1 20120405; EP 2622947 A1 20130807; EP 2622947 B1 20141112; FR 2965697 A1 20120406; FR 2965697 B1 20140103; JP 2013539185 A 20131017; JP 5926267 B2 20160525; US 2013300288 A1 20131114; US 9398678 B2 20160719
DOCDB simple family (application)
FR 2011052090 W 20110914; EP 11773074 A 20110914; FR 1057890 A 20100930; JP 2013530777 A 20110914; US 201113825913 A 20110914