EP 2623506 A8 20131009 - Side product reduction in a silazane cleavage method
Title (en)
Side product reduction in a silazane cleavage method
Title (de)
Nebenproduktreduktion in einem Silazan-Spaltungsverfahren
Title (fr)
Réduction de produit accessoire dans un procédé de division de silazane
Publication
Application
Priority
EP 12153299 A 20120131
Abstract (en)
[origin: EP2623506A1] The present invention relates to an improved silazane cleavage method, in particular for the production of molecular precursors for non-oxide inorganic ceramics.
IPC 8 full level
C04B 35/589 (2006.01); C07F 7/10 (2006.01)
CPC (source: EP)
C01B 21/0828 (2013.01); C04B 35/589 (2013.01); C07F 7/10 (2013.01); C04B 2235/483 (2013.01)
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
DOCDB simple family (publication)
DOCDB simple family (application)
EP 12153299 A 20120131