EP 2628369 A1 20130821 - PROCESS APPARATUS, IN PARTICULAR FOR PROCESSING AND/OR INSPECTING SUBSTRATES
Title (en)
PROCESS APPARATUS, IN PARTICULAR FOR PROCESSING AND/OR INSPECTING SUBSTRATES
Title (de)
PROZESSMASCHINE, INSBESONDERE ZUM BEARBEITEN UND/ODER INSPIZIEREN VON SUBSTRATEN
Title (fr)
APPAREIL DE TRAITEMENT, NOTEMMENT POUR LE TRAITEMENT ET L'INSPECTION DES SUBSTRATS
Publication
Application
Priority
- DE 102010048909 A 20101011
- EP 2011004204 W 20110820
Abstract (en)
[origin: WO2012048771A1] The invention relates to a process machine, in particular for treating and/or inspecting substrates (16), in particular boards, printed circuit boards, solar cells or the like, having at least one transport device (1) for transporting the substrates and having at least one process device (2) for processing, in particular for treating and/or inspecting, the substrates. Provision is made for the transport device and the process device to be in the form of separate, respectively independent modular units (42), wherein the modular units can be selectably combined with one another in such a manner that the transport device transports the substrates through the process device. The invention also relates to a method directed to inspecting and/or printing substrates, in particular boards, printed circuit boards, solar cells or the like, with at least one transport device for transporting the boards and at least one process device for treating and/or inspecting the substrates, wherein the transport device and the process device can be combined, as separate, respectively independent modular units, in such a manner that the transport device transports the substrates through the process device.
IPC 8 full level
H05K 3/00 (2006.01)
CPC (source: EP KR US)
B65G 37/005 (2013.01 - US); H01L 21/6719 (2013.01 - EP US); H01L 21/67724 (2013.01 - EP US); H01L 21/67775 (2013.01 - EP US); H05K 13/00 (2013.01 - KR); H05K 13/0061 (2013.01 - EP US); H05K 13/04 (2013.01 - EP US); H05K 3/1216 (2013.01 - EP US)
Citation (search report)
See references of WO 2012048771A1
Citation (examination)
- EP 1788638 A2 20070523 - BACCINI GISULFO [IT]
- US 2003044261 A1 20030306 - BONORA ANTHONY C [US], et al
- US 2001051082 A1 20011213 - KIRKPATRICK THOMAS I [US], et al
- WO 9916689 A1 19990408 - SEMITOOL INC [US], et al
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
DOCDB simple family (publication)
DE 102010048909 A1 20120412; CN 103238379 A 20130807; EP 2628369 A1 20130821; KR 20130119917 A 20131101; MX 2013003949 A 20130603; US 2013220773 A1 20130829; WO 2012048771 A1 20120419
DOCDB simple family (application)
DE 102010048909 A 20101011; CN 201180058152 A 20110820; EP 11748902 A 20110820; EP 2011004204 W 20110820; KR 20137009070 A 20110820; MX 2013003949 A 20110820; US 201113878354 A 20110820