Title (en)

DEVICE FOR HOMOTHETIC PROJECTION OF A PATTERN ONTO THE SURFACE OF A SAMPLE, AND LITHOGRAPHY METHOD USING SUCH A DEVICE

Title (de)

VORRICHTUNG FÜR HOMOTHETISCHE PROJEKTION EINES MUSTERS AUF DIE OBERFLÄCHE EINER PROBE UND LITHOGRAFIEVERFAHREN MIT EINER SOLCHEN VORRICHTUNG

Title (fr)

DISPOSITIF DE PROJECTION HOMOTHETIQUE D'UN MOTIF A LA SURFACE D'UN ECHANTILLON, PROCEDE DE LITHOGRAPHIE UTILISANT UN TEL DISPOSITIF

Publication

EP 2633367 A1 20130904 (FR)

Application

EP 11773471 A 20111025

Priority

• FR 1058972 A 20101029
• EP 2011068587 W 20111025

Abstract (en)

[origin: WO2012055833A1] The invention relates to a device for homothetic projection of a pattern onto the surface of a sample (21) comprising a photosensitive zone. The device comprises means allowing a pattern to be projected onto the surface of the sample, and an optical system (12) allowing the size of the pattern projected onto the surface of the sample to be continuously controlled. The invention also relates to a photolithography method using such a projection device, and to a method and a kit for converting an optical microscope into such a projection device.

IPC 8 full level

G02B 15/14 (2006.01); G02B 21/02 (2006.01); G03F 7/20 (2006.01)

CPC (source: EP US)

G02B 21/0016 (2013.01 - EP US); G02B 21/06 (2013.01 - US); G02B 21/082 (2013.01 - EP US); G02B 21/086 (2013.01 - EP US); G03F 7/70216 (2013.01 - EP US); G03F 7/7025 (2013.01 - EP US); G03F 7/7055 (2013.01 - US); G02B 21/025 (2013.01 - EP US)

Citation (search report)

See references of WO 2012055833A1

Designated contracting state (EPC)

AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

DOCDB simple family (publication)

WO 2012055833 A1 20120503; EP 2633367 A1 20130904; FR 2966941 A1 20120504; FR 2966941 B1 20130712; US 2014146302 A1 20140529

DOCDB simple family (application)

EP 2011068587 W 20111025; EP 11773471 A 20111025; FR 1058972 A 20101029; US 201113881842 A 20111025