EP 2633528 A1 20130904 - RESIST STRUCTURE FOR PRODUCING AN X-RAY OPTICAL GRATING STRUCTURE
Title (en)
RESIST STRUCTURE FOR PRODUCING AN X-RAY OPTICAL GRATING STRUCTURE
Title (de)
RESISTSTRUKTUR ZUR HERSTELLUNG EINER RÖNTGENOPTISCHEN GITTERSTRUKTUR
Title (fr)
STRUCTURE DE RÉSIST POUR LA FABRICATION D'UNE STRUCTURE DE GRILLE OPTIQUE À RAYONS X
Publication
Application
Priority
- DE 102010049994 A 20101028
- EP 2011005141 W 20111013
Abstract (en)
[origin: WO2012055495A1] The invention relates to a resist structure for producing an X-ray optical grating structure. The invention comprises stabilizing bars (3) which are introduced into the resist structure. The webs (1) of the resist structure are applied to a substrate (2) at a first angle alpha, and the stabilizing bars at a second angle beta, wherein, between alpha and beta, there is preferably at least a spacing of 20° and at most a spacing of 70°, in order to obtain the best possible stabilizing action. In particular, the production of X-ray optical grating structures having aspect ratios of more than 500 is made possible without the grating structures bending or the stabilizing structure having a detrimental effect on the visibility. The resist structures are suitable in particular for producing X-ray optical grating structures from gold.
IPC 8 full level
G21K 1/06 (2006.01)
CPC (source: EP)
G21K 1/06 (2013.01); G21K 2207/005 (2013.01)
Citation (search report)
See references of WO 2012055495A1
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
DOCDB simple family (publication)
WO 2012055495 A1 20120503; DE 102010049994 B3 20120510; EP 2633528 A1 20130904; EP 2633528 B1 20180718
DOCDB simple family (application)
EP 2011005141 W 20111013; DE 102010049994 A 20101028; EP 11770377 A 20111013