EP 2635722 B1 20150408 - METHOD AND DEVICE FOR CONTINUOUSLY COATING SUBSTRATES
Title (en)
METHOD AND DEVICE FOR CONTINUOUSLY COATING SUBSTRATES
Title (de)
VERFAHREN UND VORRICHTUNG ZUM KONTINUIERLICHEN BESCHICHTEN VON SUBSTRATEN
Title (fr)
PROCÉDÉ ET DISPOSITIF DE REVÊTEMENT DE SUBSTRATS EN CONTINU
Publication
Application
Priority
- DE 102010060292 A 20101101
- EP 2011069056 W 20111028
Abstract (en)
[origin: WO2012059439A1] The invention relates to a method for continuously coating at least one substrate (14) with a semiconductor material, for example CdTe. To this end, a semiconductor material is sublimated in at least one crucible (30) in order to deposit same on a substrate, for example a glass panel. If the crucible (30) is filled with semiconductor material (16) during the deposition and/or evaporation, the set-up time that is otherwise required can be eliminated. In order to carry out the method, preferably a CSS reactor is used which comprises a crucible, a guide for substrates, and at least one lock, by means of which the crucible can be replenished while semiconductor material evaporates from the crucible.
IPC 8 full level
H01L 31/18 (2006.01)
CPC (source: EP US)
C23C 14/243 (2013.01 - US); C23C 14/246 (2013.01 - EP US); C23C 14/566 (2013.01 - US); H01L 21/02631 (2013.01 - US); H10F 71/1257 (2025.01 - EP US); Y02E 10/50 (2013.01 - US)
Citation (examination)
DE 102010061259 A1 20110616 - PRIMESTAR SOLAR INC [US]
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
DOCDB simple family (publication)
DE 102010060292 A1 20120503; DE 102010060292 B4 20230525; EP 2635722 A1 20130911; EP 2635722 B1 20150408; US 2014147992 A1 20140529; US 9343305 B2 20160517; WO 2012059439 A1 20120510
DOCDB simple family (application)
DE 102010060292 A 20101101; EP 11779621 A 20111028; EP 2011069056 W 20111028; US 201113993410 A 20111028